Mems pressure sensor and method for forming the same

ABSTRACT

Provided are a MEMS pressure sensor and a method for forming the same. The method includes: preparing a first substrate including a first surface and a second surface opposite to each other; preparing a second substrate including a third surface and a fourth surface opposite to each other; bonding the first surface and the third surface with each other and forming a cavity between the first substrate and the pressure sensing region of the second substrate; thinning the second substrate from the fourth surface by partially removing the second base, to form a fifth surface opposite to the third surface; and forming a first conductive plug passing through the second substrate from the side of the fifth surface of the second substrate to the at least one conductive layer.

CROSS REFERENCE TO RELATED APPLICATIONS

This application claims the priority to Chinese Patent Application No.201510084520.X, titled “MEMS PRESSURE SENSOR AND METHOD FOR FORMING THESAME”, filed with the Chinese Patent Office on Feb. 16, 2015, which ishereby incorporated by reference in its entirety.

FIELD

The present disclosure relates to the technical field of semiconductorfabrication, and in particular to a Micro-Electro Mechanical System(abbreviated to MEMS) pressure sensor and a method for forming the MEMSpressure sensor.

BACKGROUND

A MEMS is a device which acquires and processes information and performsoperations. A sensor in the MEMS can receive external information suchas pressure, location, speed, acceleration, magnetic field, temperatureor humidity, and convert the obtained external information intoelectrical signals to be processed in the system. An example of a MEMSdevice may include a temperature sensor, a pressure sensor, a humiditysensor and the like.

The cost performance of a MEMS pressure sensor can be greatly improvedby reduced size, increased precision and utilization of a process thatis compatible with a fabrication process of an integrated circuit chip.Currently, MEMS pressure sensors include a piezoresistive type pressuresensor and a capacitive type pressure sensor.

The capacitive type pressure sensor has a high measurement accuracy anda low power consumption. A conventional capacitive type pressure sensorincludes a substrate, a first electrode layer arranged on a surface ofthe substrate, and a second electrode layer arranged on the surface ofthe substrate and on a surface of the first electrode layer. A cavity isformed between the first electrode layer and the second electrode layer,and the first electrode layer and the second electrode layer areelectrically isolated from one another with the cavity.

A capacitive structure is formed with the first electrode layer, thesecond electrode layer and the cavity. The second electrode layer may bedeformed under a pressure, which results in a change of a distancebetween the first electrode layer and second electrode layer and achange of a capacitance value of the capacitive structure. Since thepressure on the second electrode layer corresponds to the capacitancevalue of the capacitive structure, the pressure on the second electrodelayer can be converted into an electrical signal output by thecapacitive structure.

In addition, the electrical signal is transmitted between a pressuresensor chip and a signal processing circuit, so that the electricalsignal output by the pressure sensor chip is processed. The pressuresensor chip and the signal processing circuit chip are packaged in asystem to form a MEMS capacitive type pressure sensor.

In the existing methods for fabricating a MEMS pressure sensor,processes for fabricating the pressure sensor chip and the signalprocessing circuit are different, and it is difficult to achieve amonolithic integration. Moreover, in a case that an integrated circuitand a pressure sensor are fabricated on a single substrate, theexistence of the pressure sensor creates difficulty in making, changingand improving the integrated circuit, and the integrated circuit on thesame substrate makes it difficult to fabricate a small pressure sensor.Therefore, a process for fabricating an integrated circuit and apressure sensor on a single chip is complicated and a device formed bythe current process has a large size, thereby increasing its fabricationcost.

In a case that the pressure sensor and the circuit are integrated on asingle substrate, if the pressure sensor is fabricated before thecircuit is fabricated, a process for fabricating the pressure sensoroften affects the substrate and causes a difficulty in fabricating theintegrated circuit, thereby reducing production yield; alternatively, ifthe integrated circuit is fabricated before the pressure sensor isfabricated, the integrated circuit may limit greatly the choice ofmaterials of the pressure sensor and the temperature in a process forfabricating the pressure sensor, thereby decreasing the performance ofthe pressure sensor.

Hence, there is an urgent need for a method and a structure foreffectively integrating a pressure sensor and an integrated circuit.

SUMMARY

The present disclosure provides a MEMS pressure sensor and a method forfabricating the MEMS pressure sensor. In the method for fabricating theMEMS pressure sensor, the MEMS pressure sensor structure and the circuitfabrication processes are independent from one another, selection ofmaterials is more flexible, production yield is high and a subsequentintegrating process is simple, thereby improving the performance andreliability of the formed integrated pressure sensor, and reducing thesize and process cost.

In order to address the existing issue, the present disclosure providesa method for forming a MEMS pressure sensor. The method includes:preparing a first substrate, where the first substrate includes a firstsurface and a second surface opposite to the first surface, and thefirst substrate includes at least one conductive layer arranged on theside of the first surface of the first substrate; preparing a secondsubstrate, where the second substrate includes a third surface and afourth surface opposite to the third surface, the second substrateincludes a second base and a pressure-sensing electrode arranged on orabove the second base, the second substrate includes a pressure sensingregion in which the pressure-sensing electrode is arranged, and thepressure-sensing electrode is arranged on the side of the third surfaceof the second substrate; bonding the first surface of the firstsubstrate and the third surface of the second substrate with each other;forming a cavity between the first substrate and the pressure sensingregion of the second substrate; removing the second base to form a fifthsurface opposite to the third surface of the second substrate; andforming a first conductive plug passing through the second substratefrom the side of the fifth surface of the second substrate to the atleast one conductive layer, where the first conductive plug is used toelectrically connect the conductive layer to the pressure-sensingelectrode.

Optionally, the second substrate may further include a fixed electrodecorresponding to the pressure-sensing electrode and the cavity is formedbetween the pressure-sensing electrode and the fixed electrode.

Optionally, the first substrate may further include a fixed electrodearranged on the side of the first surface of the first substrate; whenthe first surface of the first substrate and the third surface of thesecond substrate are bonded with each other, the fixed electrodecorresponds to the pressure-sensing electrode and the cavity is formedbetween the pressure-sensing electrode and the fixed electrode.

Optionally, the forming the cavity may include: before the first surfaceof the first substrate and the third surface of the second substrate arebonded with each other, forming a first opening on the side of the thirdsurface of the second substrate or on the side of the first surface ofthe first substrate, or, forming the first opening on both the side ofthe first surface of the first substrate and the side of the thirdsurface of the second substrate, with a location of the first openingcorresponding to a location of the pressure sensing region.

Optionally, the first substrate may further include a circuit.

Optionally, the preparing the second substrate may include: preparing asemiconductor-on-insulator substrate, where thesemiconductor-on-insulator substrate includes a base, an insulatinglayer arranged on a surface of the base and a semiconductor layerarranged on a surface of the insulating layer; and forming apressure-sensing electrode in the semiconductor layer, with the basebeing the second base.

Optionally, the second substrate may further include a second bondinglayer arranged on the side of the third surface; or, the first substratemay include a first bonding layer arranged on the side of the firstsurface; or, the second substrate may further include a second bondinglayer arranged on the side of the third surface and the first substratemay include a first bonding layer arranged on the side of the firstsurface.

Optionally, at least one of the first bonding layer and the secondbonding layer may be comprised of an insulating material.

Optionally, the first surface of the first substrate and the thirdsurface of the second substrate may be bonded with each other by anadhesive bonding process, and the first bonding layer or the secondbonding layer may be an adhesive bonding layer which is comprised of aninsulating material, a semiconductor material, a metal material or anorganic material.

Optionally, the first surface of the first substrate and the thirdsurface of the second substrate may be bonded with each other by adirect-bonding process.

Optionally, the first substrate may include a self-test electrode, and alocation of the self-test electrode may correspond to a location of thepressure sensing region after the first surface of the first substrateand the third surface of the second substrate are bonded with eachother.

Optionally, the second substrate may further include a reference unitregion, a cavity may be formed between the first substrate and thereference unit region of the second substrate when the first surface ofthe first substrate and the third surface of the second substrate arebonded with each other, and a deformation on a portion of the secondsubstrate corresponding to the reference unit region may be less than adeformation on a portion of the second substrate corresponding to thepressure sensing region under a same external pressure.

Optionally, the method may further include: forming a second openingpassing through the first substrate, where a location of the secondopening corresponds to a location of the pressure sensing region of thesecond substrate after the first surface of the first substrate and thethird surface of the second substrate are bonded with each other.

Optionally, the method may further include: forming a fourth conductiveplug passing through the first substrate from the side of the secondsurface of the first substrate to the at least one conductive layer.

Accordingly, the present disclosure further provides a method forforming a MEMS pressure sensor. The method includes: preparing a firstsubstrate, where the first substrate includes a first surface and asecond surface opposite to the first surface, and the first substrateincludes at least one conductive layer arranged on the side of the firstsurface of the first substrate; preparing a second substrate, where thesecond substrate includes a third surface and a fourth surface oppositeto the third surface, the second substrate includes a second base and apressure-sensing electrode arranged on or above or in the second base,the second substrate includes a pressure sensing region in which thepressure-sensing electrode is arranged, and the pressure-sensingelectrode is arranged on the side of the third surface of the secondsubstrate; bonding the first surface of the first substrate and thethird surface of the second substrate with each other; forming a cavitybetween the first substrate and the pressure sensing region of thesecond substrate; thinning the second substrate from the fourth surfaceby partially removing the second base, to form a fifth surface oppositeto the third surface of the second substrate; and forming a firstconductive plug passing through the second substrate from the side ofthe fifth surface of the second substrate to the at least one conductivelayer, where the first conductive plug is used to electrically connectthe conductive layer to the pressure-sensing electrode.

Optionally, the second substrate may further include a fixed electrodecorresponding to the pressure-sensing electrode and the cavity may beformed between the pressure-sensing electrode and the fixed electrode.

Optionally, the first substrate may further include a fixed electrodearranged on the side of the first surface of the first substrate; whenthe first surface of the first substrate and the third surface of thesecond substrate are bonded with each other, the fixed electrode maycorrespond to the pressure-sensing electrode and the cavity may beformed between the pressure-sensing electrode and the fixed electrode.

Optionally, the forming the cavity may include: before the first surfaceof the first substrate and the third surface of the second substrate arebonded with each other, forming a first opening on the side of the thirdsurface of the second substrate or on the side of the first surface ofthe first substrate, or, forming the first opening on both the side ofthe first surface of the first substrate and the side of the thirdsurface of the second substrate e, with a location of the first openingcorresponding to a location of the pressure sensing region.

Optionally, the first substrate may further include a circuit.

Optionally, a third opening may be formed in the second substrate afterthe second substrate is thinned from the fourth surface, with a locationof the third opening corresponding to a location of the pressure sensingregion.

Optionally, the preparing the second substrate may include: preparing asemiconductor-on-insulator substrate, where thesemiconductor-on-insulator substrate includes a base, an insulatinglayer arranged on a surface of the base and a semiconductor layerarranged on a surface of the insulating layer; and forming apressure-sensing electrode in the semiconductor layer, with the basebeing the second base.

Optionally, the second substrate may further include a second bondinglayer arranged on the side of the third surface; or, the first substratemay include a first bonding layer arranged on the side of the firstsurface; or, the second substrate may further include a second bondinglayer arranged on the side of the third surface and the first substratemay include a first bonding layer arranged on the side of the firstsurface.

Optionally, at least one of the first bonding layer and the secondbonding layer is comprised of an insulating material.

Optionally, the first surface of the first substrate and the thirdsurface of the second substrate may be bonded with each other by anadhesive bonding process, and the first bonding layer or the secondbonding layer may be an adhesive bonding layer which is comprised of aninsulating material, a semiconductor material, a metal material or anorganic material.

Optionally, the first surface of the first substrate and the thirdsurface of the second substrate may be bonded with each other by adirect-bonding process.

Optionally, the first substrate may further include a self-testelectrode, with a location of the self-test electrode corresponding to alocation of the pressure sensing region after the first surface of thefirst substrate and the third surface of the second substrate are bondedwith each other.

Optionally, the second substrate may further include a reference unitregion, a cavity may be formed between the first substrate and thereference unit region of the second substrate when the first surface ofthe first substrate and the third surface of the second substrate arebonded with each other, and a deformation on a portion of the secondsubstrate corresponding to the reference unit region may be less than adeformation on a portion of the second substrate corresponding to thepressure sensing region under a same external pressure.

Optionally, the method may further include: forming a second openingpassing through the first substrate, where a location of the secondopening corresponds to a location of the pressure sensing region of thesecond substrate after the first surface of the first substrate and thethird surface of the second substrate are bonded with each other.

Optionally, the method may further include: forming at least one fifththrough hole passing through the second base, on the side of the fifthsurface of the second substrate, with a location of the fifth throughhole corresponding to a location of the pressure sensing region.

Optionally, the method may further include: forming a fourth conductiveplug passing through the first substrate from the side of the secondsurface of the first substrate to the at least one conductive layer.

Accordingly, the present disclosure further provides a Micro-ElectroMechanical System (MEMS) pressure sensor. The MEMS pressure sensorincludes: a first substrate, where the first substrate includes a firstsurface and a second surface opposite to the first substrate, and thefirst substrate includes at least one conductive layer arranged on theside of the first surface of the first substrate; a second substrate,where the second substrate includes a third surface and a fifth surfaceopposite to the third surface, the second substrate includes apressure-sensing electrode, and the second substrate includes a pressuresensing region in which the pressure-sensing electrode is arranged, thefirst surface of the first substrate and the third surface of the secondsubstrate are bonded with each other; a cavity formed between the firstsubstrate and the pressure sensing region of the second substrate; and afirst conductive plug passing through the second substrate from the sideof the fifth surface of the second substrate to the at least oneconductive layer, where the first conductive plug is used toelectrically connect the conductive layer to the pressure-sensingelectrode.

Optionally, the second substrate may further include a fixed electrodecorresponding to the pressure-sensing electrode and the cavity may beformed between the pressure-sensing electrode and the fixed electrode.

Optionally, the first substrate may further include a fixed electrodearranged on the side of the first surface of the first substrate; thefixed electrode may correspond to the pressure-sensing electrode and thecavity may be formed between the pressure-sensing electrode and thefixed electrode.

Optionally, the first substrate may further include a circuit.

Optionally, the second substrate may further include a second bondinglayer arranged on the side of the third surface; or, the first substratemay include a first bonding layer arranged on the side of the firstsurface; or, the second substrate may further include a second bondinglayer arranged on the side of the third surface and the first substratemay include a first bonding layer arranged on the side of the firstsurface.

Optionally, at least one of the first bonding layer and the secondbonding layer may be comprised of an insulating material.

Optionally, the first bonding layer or the second bonding layer may bean adhesive bonding layer which is comprised of an insulating material,a semiconductor material, a metal material or an organic material.

Optionally, the first bonding layer may be a bonding layer; or, thesecond bonding layer may be a bonding layer; or, the first bonding layerand the second bonding layer may be bonding layers.

Optionally, the first substrate may further include a self-testelectrode, with a location of the self-test electrode corresponding to alocation of the pressure sensing region of the second substrate.

Optionally, the second substrate may further include a reference unitregion, a cavity may be formed between the first substrate and thereference unit region of the second substrate, and a deformation on aportion of the second substrate corresponding to the reference unitregion may be less than a deformation on a portion of the secondsubstrate corresponding to the pressure sensing region.

Optionally, the MEMS pressure sensor may further include: a secondopening passing through the first substrate, with a location of thesecond opening corresponding to a location of the pressure sensingregion of the second substrate.

Optionally, the MEMS pressure sensor may further include: a fourthconductive plug passing through the first substrate from the side of thesecond surface of the first substrate to the at least one conductivelayer.

Accordingly, the present disclosure further provides a MEMS pressuresensor. The MEMS pressure sensor includes: a first substrate, where thefirst substrate includes a first surface and a second surface oppositeto the first surface, and the first substrate includes at least oneconductive layer arranged on the side of the first surface of the firstsubstrate; a second substrate, where the second substrate includes athird surface and a fifth surface opposite to the third surface, thesecond substrate includes a second base and a pressure-sensing electrodearranged on or above or in the second base, and the second substrateincludes a pressure sensing region in which the pressure-sensingelectrode is arranged, the first surface of the first substrate and thethird surface of the second substrate are bonded with each other; acavity formed between the first substrate and the pressure sensingregion of the second substrate; and a first conductive plug passingthrough the second substrate from the side of the fifth surface of thesecond substrate to the at least one conductive layer, where the firstconductive plug is used to electrically connect the conductive layer tothe pressure-sensing electrode.

Optionally, the second substrate may further include a fixed electrodecorresponding to the pressure-sensing electrode and the cavity may beformed between the pressure-sensing electrode and the fixed electrode.

Optionally, the first substrate may further include a fixed electrodearranged on the side of the first surface of the first substrate; thefixed electrode may correspond to the pressure-sensing electrode and thecavity may be formed between the pressure-sensing electrode and thefixed electrode.

Optionally, the first substrate may further include a circuit.

Optionally, a third opening may be formed in the second substrate, witha location of the third opening corresponding to a location of thepressure sensing region.

Optionally, the second substrate may further include a second bondinglayer arranged on the side of the third surface; or, the first substratemay include a first bonding layer arranged on the side of the firstsurface; or, the second substrate may further include a second bondinglayer arranged on the side of the third surface and the first substratemay include a first bonding layer arranged on the side of the firstsurface.

Optionally, at least one of the first bonding layer and the secondbonding layer may be comprised of an insulating material.

Optionally, the first bonding layer or the second bonding layer may bean adhesive bonding layer which is comprised of an insulating material,a semiconductor material, a metal material or an organic material.

Optionally, the first bonding layer may be a bonding layer; or, thesecond bonding layer may be a bonding layer; or, the first bonding layerand the second bonding layer may be bonding layers.

Optionally, the first substrate may further include a self-testelectrode, with a location of the self-test electrode corresponding to alocation of the pressure sensing region of the second substrate.

Optionally, the second substrate may further include a reference unitregion, a cavity may be formed between the first substrate and thereference unit region of the second substrate, and a deformation on aportion of the second substrate corresponding to the reference unitregion may be less than a deformation on a portion of the secondsubstrate corresponding to the pressure sensing region.

Optionally, a second opening passing through the first substrate may beformed, with a location of the second opening corresponding to alocation of the pressure sensing region of the second substrate.

Optionally, the MEMS pressure sensor may further include: at least onefifth through hole arranged on the side of the fifth surface of thesecond substrate and passing through the second base, with a location ofthe fifth through hole corresponding to a location of the pressuresensing region.

Optionally, the MEMS pressure sensor may further include: a fourthconductive plug passing through the first substrate from the side of thesecond surface of the first substrate to the at least one conductivelayer.

Compared with the conventional technologies, technical solutions of thepresent disclosure have the following advantages.

In a fabrication method according to the present disclosure, a firstsubstrate including a conductive layer and a second substrate includinga pressure-sensing electrode are prepared. The conductive layer isarranged on the side of a first surface of the first substrate, and thepressure-sensing electrode is arranged on the side of a third surface ofthe second substrate. A stacked structure of the first substrate andsecond substrate can be formed by bonding the first surface of the firstsubstrate and the third surface of the second substrate with each other.The conductive layer may be used to transmit an electrical signal outputby a capacitor including the pressure-sensing electrode. After thesecond base is removed and a fifth surface opposite to the third surfaceis formed, a first conductive plug passing through the second substratefrom the fifth surface of the second substrate to the conductive layeris formed to electrically connect the conductive layer and the capacitorincluding the pressure-sensing electrode. Since the first conductiveplug is exposed in the fifth surface of the second substrate, it is easyto form subsequently a first conductive structure, which is electricallyconnected to the pressure-sensing electrode, at the top of the firstconductive plug, and thus the pressure-sensing electrode is electricallyconnected to the conductive layer.

The conductive layer is formed in the first substrate, thepressure-sensing electrode is formed in the second substrate, and thefirst substrate is stacked with the second substrate by bonding thefirst surface of the first substrate and the third surface of the secondsubstrate with each other. Therefore, it is avoided to form a conductivelayer, a fixed electrode, a pressure-sensing electrode corresponding tothe fixed electrode and a cavity between the pressure-sensing electrodeand the base in a layer by layer manner on a single base, therebyreducing the difficulty of process and, in particular, reducing thedifficulty of a process for forming the cavity. Furthermore, it can beavoided that a temperature in a process for forming the first substratelimits or affects a fabrication process of the second substrate. In thiscase, selection of materials and processes for the second substrate andthe pressure-sensing electrode in the second substrate is more flexible,and the performance of the formed pressure-sensing electrode isimproved.

Since the first surface of the first substrate is in contact with thethird surface of the second substrate, a contact area between the firstsurface and the third surface is large and a bonding strength betweenthe first substrate and the second substrate is high. In this case, itis not easy to bend, break or deform a stacked structure of the firstsubstrate and the second substrate, thereby providing a more stable andreliable structure of the formed pressure sensor and improving thedurability of the formed pressure sensor.

With the above method, the distance between the fourth surface of thesecond substrate and the second surface of the first substrate is short,thereby reducing the size and the fabrication cost of the formedpressure sensor.

Besides, since the conductive layer is electrically connected to thecapacitor including the pressure-sensing electrode by forming a firstconductive plug passing through the second substrate from the fifthsurface of the second substrate to the conductive layer, no additionalconductive layer is necessary between the first surface of the firstsubstrate and the third surface of the second substrate for the purposeof providing electrical connection, avoiding any negative impact thatcould be generated by the additional conductive layer. Since theselection of materials of the first surface of the first substrate andthe third surface of the second substrate is more flexible, an excessivethermal expansion coefficient mismatch between the material of the firstsurface and the material of the third surface can be avoided, and theperformance of the formed pressure sensor can be made more stable. Sincethe processes for forming the first substrate and the second substrateare more independent, the fabrication process of the pressure sensor ismore compatible with various fabrication processes of integratedconductive layer, thereby reducing the fabrication cost.

Further, the second substrate may include a fixed electrodecorresponding to the pressure-sensing electrode. A cavity is formedbetween the pressure-sensing electrode and the fixed electrode. Acapacitive type pressure sensor is formed with the pressure-sensingelectrode, the fixed electrode and the cavity. If a pressure is appliedto the pressure-sensing electrode, a capacitance of the capacitor formedwith the pressure-sensing electrode, the fixed electrode and the cavitymay change, and thus an electrical signal changing with the pressurechanging is outputted.

Further, the first substrate may include a fixed electrode. A firstopening is formed from the third surface of the second substrate. Whenthe first surface of the first substrate and the third surface of thesecond substrate are bonded with each other, a cavity is formed betweenthe pressure-sensing electrode and the fixed electrode with the firstopening and the first surface of the first substrate. The capacitivetype pressure sensor is formed with pressure-sensing electrode, thefixed electrode and the cavity.

Further, the first substrate includes a circuit. An electrical signaloutput by the capacitor including the pressure-sensing electrode can bereadily processed by the circuit since the first substrate is bonded andelectrically coupled with the second substrate.

Further, the second substrate is formed by preparing asemiconductor-on-insulator substrate. Specifically, a pressure-sensingelectrode can be formed by patterning a semiconductor layer in thesemiconductor-on-insulator substrate. The pressure-sensing electrode maybe deformed under a pressure, which leads to a change of a capacitancebetween the pressure-sensing electrode and the fixed electrode, therebyoutputting an electrical signal related to the pressure on thepressure-sensing electrode. Since the semiconductor layer in thesemiconductor-on-insulator substrate is comprised of a single crystalsemiconductor material, a pressure-sensing electrode formed by dopingions into the single crystal semiconductor material has a goodpressure-sensing property, thereby improving the sensitivity and thestability of the formed pressure-sensing electrode.

Further, a first opening is formed from the third surface of the secondsubstrate or the first surface of the first substrate; or, firstopenings are formed from the first surface and the third surface. Acavity between the pressure-sensing electrode and fixed electrode isformed by the first opening and the first surface of the first substratewhen the first surface of the first substrate and the third surface ofthe second substrate are bonded with each other. The first surfacecontacts with the third surface in a large area other than a location ofthe first opening. Therefore, a total thickness of the bonded first andsecond substrates is small, a mechanical strength of the stackedstructure of the first substrate and the second substrate is high andthe performance of the formed pressure sensor is improved.

Further, the first substrate may further include a self-test electrode.A location of the self-test electrode corresponds to a location of thepressure-sensing electrode after the first surface of the firstsubstrate and the third surface of the second substrate are bonded witheach other. The self-test electrode can generate an electrostaticpulling force and therefore a deformation on the pressure-sensingelectrode. A capacitance changing in the pressure-sensing electrode dueto this deformation can be used to detect whether the pressure-sensingelectrode works normally.

Further, the second substrate includes a sensing unit region and areference unit region, and cavities are formed in the sensing unitregion and the reference unit region. For example, a cover layer may beformed on a portion of the fifth surface of the second substratecorresponding to the reference unit region. In this case, a deformationof the pressure-sensing electrode in the reference unit region due to anexternal pressure can be avoided or reduced, however, a capacitance ofthe pressure-sensing electrode in the reference unit region may changedue to a factor other than pressure. An electrical signal generated dueto the external pressure can be obtained by subtracting the electricalsignal output by the pressure-sensing electrode in the reference unitregion from an electrical signal output by the pressure-sensingelectrode in the sensing unit region. Therefore, the accuracy of theformed pressure sensor is improved.

Further, a second opening in the first substrate is formed. A locationof the second opening corresponds to a location of the pressure sensingregion after the first surface of the first substrate and the thirdsurface of the second substrate are bonded with each other. Since thesecond opening is exposed to an external environment, two sides of apressure-sensing electrode can acquire pressures from the externalenvironment and the pressure-sensing electrode can acquire a signalrepresenting a difference between the pressures on the two sides of thepressure-sensing electrode. In this case, the formed pressure sensor canserves as a differential pressure sensor.

In another fabrication method according to the present disclosure, afirst substrate including a conductive layer and a second substrateincluding a pressure-sensing electrode are prepared. A stacked layerstructure of the first and second substrates can be formed by bonding afirst surface of the first substrate and a third surface of the secondsubstrate with each other. The conductive layer can transmit anelectrical signal output from a capacitor including the pressure-sensingelectrode. In order to electrically connect the conductive layer to thepressure-sensing electrode, a first conductive plug passing through thesecond substrate from a fifth surface of the second substrate to theconductive layer is formed after a second base is thinned partially andthe fifth surface is formed. Since the first conductive plug is exposedin the fifth surface of the second substrate, it is easy to formsubsequently a first conductive structure, which is electricallyconnected to the pressure-sensing electrode, at the top of the firstconductive plug, and thus the pressure-sensing electrode is electricallyconnected to the conductive layer. Since the first surface is in contactwith the third surface in a large area, the mechanical strength of thestacked structure of the first substrate and the second substrate ishigh and the formed pressure sensor has a stable structure and animproved durability. In addition, the size of the formed pressure sensoris small since a distance between the fifth surface of the secondsubstrate and a second surface of the first substrate is short. Sincethe selection of materials of the first surface and a third surface ismore flexible, an excessive thermal expansion coefficient mismatchbetween the material of the first surface and the material of the thirdsurface can be avoided, and the performance of the formed pressuresensor can be made more stable.

Further, the second substrate includes a third opening, with a locationof the third opening corresponding to a location of the pressure sensingregion. Since regions other than the pressure sensing region are coveredby the second base, a distance from the pressure-sensing electrode tothe external environment may be increased while the pressure-sensingelectrode acquires an external pressure, thereby protecting thepressure-sensing electrode and avoiding a wear or other damages on thepressure-sensing electrode and a protective layer on a surface of thepressure-sensing electrode.

A structure according to the present disclosure includes a firstsubstrate including a conductive layer and a second substrate includinga pressure-sensing electrode. The conductive layer is arranged on theside of a first surface of the first substrate. The first surface of thefirst substrate and a third surface of the second substrate are bondedwith each other. Therefore, the first substrate and the second substrateare stacked with each other, and the conductive layer is used totransmit an electrical signal output from a capacitor including thepressure-sensing electrode. A first conductive plug passing through thesecond substrate from a fifth surface of the second substrate to theconductive layer is formed, and hence the pressure-sensing electrode canbe electrically connected to the conductive layer via the firstconductive plug and a first conductive structure. Since the firstsurface is in contact with the third surface in a large area, amechanical strength of the stacked structure of the first substrate andthe second substrate is high and the formed pressure sensor has a stablestructure and an improved durability. In addition, the size of theformed pressure sensor is small since a distance between a fifth surfaceof the second substrate and a second surface of the first substrate isshort. Since the selection of materials of the first surface and thethird surface is more flexible, an excessive thermal expansioncoefficient mismatch between the material of the first surface and thematerial of the third surface can be avoided, and the performance of theformed pressure sensor can be made more stable.

Another structure according to the present disclosure includes a firstsubstrate including a conductive layer, and a second substrate includinga second base and a pressure-sensing electrode arranged on or above thesecond base. The conductive layer is arranged on the side of a firstsurface of the first substrate, and the pressure-sensing electrode isarranged on the side of a third surface of the second substrate. Sincethe first surface of the first substrate and the third surface of thesecond substrate are bonded with each other, the first substrate isstacked with the second substrate, and the conductive layer is used totransmit an electrical signal output from a capacitor including thepressure-sensing electrode. The pressure-sensing electrode can beprotected by the second base since the second base is arranged on theside of a fifth surface of the second substrate. In addition, a firstconductive plug passing through the second substrate from the fifthsurface of the second substrate to the conductive layer is formed, andhence the capacitor including the pressure-sensing electrode can beelectrically connected to the conductive layer via the first conductiveplug and a first conductive structure. Since the first surface is incontact with the third surface in a large area, the mechanical strengthof the first and second substrates is high and the formed pressuresensor has a stable structure and an improved durability. Furthermore,no extra space exists between the first surface of the first substrateand the third surface of the second substrate, and a distance betweenthe fifth surface of the second substrate and a second surface of thefirst substrate is short, and hence the size of the formed pressuresensor is small. Since the selection of materials of the first surfaceand a third surface is more flexible, an excessive thermal expansioncoefficient mismatch between the material of the first surface and thematerial of the third surface can be avoided, and the performance of theformed pressure sensor can be more stable.

BRIEF DESCRIPTION OF THE DRAWINGS

FIGS. 1 to FIG. 9 are schematic cross-sectional diagrams of a MEMSpressure sensor in a fabrication process according to an embodiment ofthe present disclosure;

FIGS. 10 to FIG. 11 are schematic cross-sectional diagrams of a MEMSpressure sensor in a fabrication process according to an embodiment ofthe present disclosure;

FIGS. 12 to FIG. 15 are schematic cross-sectional diagrams of a MEMSpressure sensor in a fabrication process according to an embodiment ofthe present disclosure;

FIGS. 16 to FIG. 17 are schematic cross-sectional diagrams of a MEMSpressure sensor in a fabrication process according to an embodiment ofthe present disclosure;

FIGS. 18 to FIG. 20 are schematic cross-sectional diagrams of a MEMSpressure sensor in a fabrication process according to an embodiment ofthe present disclosure;

FIGS. 21 to FIG. 23 are schematic cross-sectional diagrams of a MEMSpressure sensor in a fabrication process according to an embodiment ofthe present disclosure;

FIGS. 24 to FIG. 26 are schematic cross-sectional diagrams of a MEMSpressure sensor in a fabrication process according to an embodiment ofthe present disclosure; and

FIG. 27 is a schematic cross-sectional diagram of a MEMS pressure sensorin a fabrication process according to an embodiment of the presentdisclosure.

DETAILED DESCRIPTION OF EMBODIMENTS

As described in the Background, in the existing methods for fabricatinga MEMS capacitive type pressure sensor, a process of integrating apressure sensor chip with a signal processing circuit is complicated andthe size of the formed device is large.

In an existing method for fabricating a MEMS capacitive type pressuresensor, a pressure sensor chip and a signal processing circuit chip arefabricated separately, and then are placed on a packaging substratehaving a cavity, and are connected to each other using a wirebondinglead. The sensor chip and the signal processing circuit chip after beingconnected to each other are coated with a layer of protective gel, henceto be surrounded by the protective gel. After the protective gel iscoated, a plastic or metal cover is placed outside the protective gelfor cover/sealing. In another existing embodiment, the pressure sensorchip and the signal processing circuit chip may be placed on a flatpackaging substrate and are connected to each other using thewirebonding lead, and then the pressure sensor chip and the signalprocessing circuit chip are coated with a layer of protective soft geland are covered with a metal shell.

However, in fabricating the above MEMS capacitive type pressure sensor,the pressure sensor chip and the signal processing circuit chip arearranged separately side by side on a surface of the packagingsubstrate. In this case, the formed MEMS pressure sensor has a largesize, which cannot meet advanced miniaturization requirement for theMEMS pressure sensors. Furthermore, after being placed on the packagingsubstrate, the pressure sensor chip and the signal processing circuitchip have to be protected using the protective gel and covered with theplastic or metal cover, the fabrication process is complicated and it isnot easily compatible with monolithic integration using variousintegrated circuit fabrication processes.

In order to address the above issue, the present disclosure provides aMEMS capacitive type pressure sensor and a method for forming the MEMScapacitive type pressure sensor. In the method, a first substrateincluding a conductive layer and a second substrate including apressure-sensing electrode are prepared. The conductive layer isarranged on the side of a first surface of the first substrate and thepressure-sensing electrode is arranged on the side of a third surface ofthe second substrate. A stacked structure of the first and secondsubstrates may be formed by bonding the first surface of the firstsubstrate and the third surface of the second substrate with each other.The conductive layer may be used to transmit an electrical signal outputfrom a capacitor including the pressure-sensing electrode. After asecond base is removed or thinned and a fifth surface opposite to thethird surface is formed, a first conductive plug passing through thesecond substrate from the fifth surface of the second substrate to theconductive layer is formed to electrically connect the conductive layerand the capacitor including the pressure-sensing electrode. Since thefirst conductive plug is exposed in the fifth surface of the secondsubstrate, it is easy to subsequently form a first conductive structure,which is electrically connected to the pressure-sensing electrode, atthe top of the first conductive plug, and thus the pressure-sensingelectrode is electrically connected to the conductive layer.

The conductive layer is formed in the first substrate, and thepressure-sensing electrode is formed in the second substrate. The firstsubstrate is stacked with the second substrate by bonding the firstsurface of the first substrate and the third surface of the secondsubstrate with each other. In this case, it is avoided to form theconductive layer, a fixed electrode, the pressure-sensing electrodecorresponding to the fixed electrode and a cavity between thepressure-sensing electrode and the fixed electrode in a layer by layermanner on a single base, thereby reducing a difficulty of processes and,in particular, reducing a difficulty of a process for forming thecavity. In addition, it is avoided that a temperature for forming thefirst substrate limits or affects a fabrication process of the secondsubstrate. In this case, selection of materials and processes for thesecond substrate and the pressure-sensing electrode is more flexible,and the sensitivity of the formed pressure-sensing electrode isimproved.

Since the first surface of the first substrate bonds with the thirdsurface of the second substrate in a large area, the overall strength ofa stacked structure of the first substrate and the second substrate ishigh. In this case, it is not easy to bend, break or deform the stackedstructure of the first substrate and the second substrate, therebyimproving the reliability of the structure of the formed pressure sensorand improving the durability of the formed pressure sensor.

With the above method, a distance between the fifth surface of thesecond substrate and the second surface of the first substrate is short,thereby reducing the size and a fabrication cost of the formed pressuresensor.

Furthermore, since the conductive layer is electrically connected to thecapacitor including the pressure-sensing electrode by forming the firstconductive plug passing through the second substrate from the fifthsurface of the second substrate to the conductive layer, no additionalconductive layer is necessary between the first surface of the firstsubstrate and the third surface of the second substrate for the purposeof providing electrical connection, avoiding any negative impact thatcould be generated by the additional conductive layer. In addition, theselection of materials of the first surface of the first substrate andthe third surface of the second substrate is more flexible, an excessivethermal expansion coefficient mismatch between the material of the firstsurface and the material of the third surface can be avoided, and theperformance of the formed pressure sensor can be made more stable. Sincethe processes for forming the first substrate and the second substrateare more independent, the fabrication process of the pressure sensor ismore compatible with various integrated circuit fabrication processes,thereby reducing the fabrication cost.

In the following, specific embodiments of the present disclosure aredescribed in detail in conjunction with the drawings, to make the aboveobjectives, properties and advantages of the present disclosure moreapparent.

First Embodiment

FIGS. 1 to FIG. 9 are schematic cross-sectional diagram of a MEMSpressure sensor in a fabrication process according to an embodiment ofthe present disclosure.

Referring to FIG. 1, a first substrate 100 is prepared. The firstsubstrate 100 includes a first surface 101 and a second surface 102opposite to the first surface 101. The first substrate 100 includes atleast one conductive layer 103 arranged on the side of the first surface101 of the first substrate 100.

In the embodiment, the first substrate 100 further includes a fixedelectrode 140 arranged on the side of the first surface 101 of the firstsubstrate 100. When the first surface 101 of the first substrate 100 anda third surface of a second substrate are bonded with each other, thefixed electrode 140 is arranged opposite to a pressure-sensingelectrode, a cavity is formed between the pressure-sensing electrode andthe fixed electrode, and a pressure-sensing capacitor structure can beformed with the pressure-sensing electrode, the fixed electrode and thecavity. A capacitance of the pressure-sensing capacitor structure maychange with a change of a pressure applied on the pressure-sensingelectrode. In another embodiment, the fixed electrode may be formed inthe second substrate.

The first substrate 100 is used to form the conductive layer 103, andthe conductive layer 103 is used to transmit an electrical signal outputfrom a capacitor including a pressure-sensing electrode.

In the embodiment, the first substrate 100 includes a first base 104, afirst dielectric layer 105 arranged on a surface of the first base 104,the conductive layer 103 arranged on a surface of the first dielectriclayer 105, and a first bonding layer 106 arranged on the side of thefirst surface 101. In the embodiment, the conductive layer 103 has asingle layer structure. In another embodiment, the conductive layer mayinclude multiple conductive layers. In this case, a first conductiveplug subsequently formed may be connected to at least one conducivelayer. In another embodiment, the first substrate 100 may not includethe first bonding layer 106.

The first base 104 includes a silicon substrate, a silicon germaniumsubstrate, a silicon carbide substrate, a glass substrate or an III-Vgroup compound substrate (such as a gallium nitride substrate or agallium arsenide substrate).

The first dielectric layer 105 is used to electrically isolate theconductive layer 103 from the first base 104. The first dielectric layer105 may be comprised of silicon oxide, silicon nitride, siliconoxynitride, a low-k dielectric material (material with a dielectricconstant in a range from 2.5 to 3.9) or an ultra low-k dielectricmaterial (material with a dielectric constant less than 2.5). The firstdielectric layer 105 may be formed by an oxidation process, a chemicalvapor deposition process, a physical vapor deposition process or anatomic layer deposition process.

The conductive layer 103 may be comprised of a conductive materialincluding a metal material, a metal compound material or a semiconductormaterial doped with ions. The process of forming the conductive layer103 includes: depositing a conductive material layer on a surface of thefirst dielectric layer 105; forming a patterned layer on a surface ofthe conductive material layer, with a portion of the surface of theconductive material layer being exposed from the patterned layer; andetching the conductive material layer with the patterned layer being amask until the first dielectric layer 105 is exposed. The conductivematerial layer may be formed by a chemical vapor deposition process, aphysical vapor deposition process or an atomic layer deposition process.The patterned layer is a patterned photoresist layer. The conductivematerial layer may be etched with a dry etching process.

The process of forming the fixed electrode 140 includes: depositing asecond electrode layer on a surface of the first dielectric layer 105;forming a patterned layer on a surface of the second electrode layer,with a portion of the surface of the second electrode layer beingexposed from the patterned layer; and etching the second electrode layerwith the patterned layer being a mask until the surface of the firstdielectric layer 105 is exposed. The second electrode layer may beformed by a chemical vapor deposition process, a physical vapordeposition process or an atomic layer deposition process. The patternedlayer includes a patterned photoresist layer, and the conductivematerial layer may be etched with a dry etching process.

In the embodiment, the fixed electrode 140 and the conductive layer 103are arranged in a same layer and formed simultaneously. The fixedelectrode 140 may be comprised of a metal material, a metal compoundmaterial or a semiconductor material doped with ions. In anotherembodiment, the fixed electrode may be formed before or after theconductive layer is formed, and the fixed electrode and the conductivelayer may be arranged in different layers.

The first bonding layer 106 protects the conductive layer 103, and is tobe bonded with a second bonding layer of a surface of a second substratesubsequently, to bond the first substrate 100 and the second substratewith each other. The first bonding layer 106 has a flat surface, thatis, the first surface 101 of the first substrate 100 is flat. A thirdsurface of the second substrate prepared subsequently is also flat. Inthis case, a contact area between the first surface 101 and the thirdsurface is large after the first surface 101 of the first substrate 100and the third surface of the second substrate are bonded, the strengthof a stacked structure of the first surface 101 and the second substrateis high and the first surface 101 is bonded with the second substratestably.

The first bonding layer 106 may be comprised of one or more of aninsulating material, a metal material, a metal compound material and asemiconductor material. The insulating material includes silicon oxide,silicon nitride, silicon oxynitride, a low-k dielectric material or anultra low-k dielectric material. The metal material includes one or moreof copper, tungsten, aluminum, silver, titanium and tantalum. The metalcompound material includes one or two of titanium nitride and tantalumnitride. The semiconductor material includes one or more ofpolycrystalline silicon, amorphous silicon, polycrystalline germanium,amorphous germanium, silicon germanium and silicon carbide which aredoped with ions. The ions being doped include one or more of p-typeions, n-type ions, carbon ions, nitrogen ions, fluoride ions andhydrogen ions.

In an embodiment, the first bonding layer 106 is comprised of siliconoxide. The process of forming the first bonding layer includes:depositing a first bonding film partially on a surface of the firstdielectric layer 105 and partially on a surface of the conductive layer103; and forming the first bonding layer 106 by flatting the firstbonding film with a chemical mechanical polishing process.

In another embodiment, the first substrate 100 may not include the firstbonding layer and the second substrate prepared subsequently may includea second bonding layer.

In addition, the first substrate 100 further includes a circuitincluding a semiconductor device structure and an electricalinterconnection structure. The conductive layer 103 may be one ofconductive layers of the circuit, or, may be a conductive layer added tothe circuit. The conductive layer 103 may include a conductor or asemiconductor.

In the embodiment, a second substrate is prepared. The second substrateincludes a third surface and a fourth surface opposite to the thirdsurface. The second substrate includes a second base and apressure-sensing electrode arranged on or above the second base. Thepressure-sensing electrode is arranged on the side of the third surfaceof the second substrate. In the following, a fabrication process of thesecond substrate is described.

Referring to FIG. 2, a second base 110, a protective layer 111 arrangedon a surface of the second base 110 and a first electrode layer 112arranged on a surface of the protective layer 111 are prepared.

In an embodiment, the second base 110, the protective layer 11 and thefirst electrode layer 112 are formed with a semiconductor-on-insulatorsubstrate. Specifically, the semiconductor-on-insulator substrate isprepared, where the semiconductor-on-insulator substrate includes abase, an insulating layer arranged on a surface of the base and asemiconductor layer arranged on a surface of the insulating layer. Thebase is the second base 110 and the insulating layer is the protectivelayer 111.

The semiconductor-on-insulator substrate includes a silicon-on-insulatorsubstrate. The protective layer may be comprised of silicon oxide, i.e.buried oxide layer (BOX). The first electrode layer 112 may be comprisedof monocrystalline silicon or monocrystalline germanium. Since the firstelectrode layer 112 may be comprised of monocrystalline silicon materialwhich is doped with doping ions, a capacitance of the capacitorincluding the pressure-sensing electrode may change more due to adeformation of the pressure-sensing electrode, that is, the sensitivityof the formed pressure-sensing electrode is improved and the performanceof the formed pressure-sensing electrode is more stable and reliable. Inaddition, in a case that the semiconductor layer of thesemiconductor-on-insulator substrate directly serves as the firstelectrode layer 112 and the insulating layer serves as the protectivelayer 111, it is unnecessary to form a first electrode layer 112 and aprotective layer 111 by an additional deposition process, therebysimplify the fabrication process.

In another embodiment, the second base 110 is a body base. The body baseincludes a silicon substrate, a silicon germanium substrate, a siliconcarbide substrate, a glass substrate or an III-V group compoundsubstrate (such as a gallium nitride substrate or a gallium arsenidesubstrate).

The protective layer 111 and the first electrode layer 112 are formed bya deposition process including a physical vapor deposition process, achemical vapor deposition process or atomic layer deposition process.The protective layer 111 may be comprised of an insulating material suchas silicon oxide, silicon nitride, silicon oxynitride, a low-kdielectric material or an ultra low-k dielectric material. The firstelectrode layer 112 may be comprised of a semiconductor material such aspolycrystalline silicon, amorphous silicon, polycrystalline germanium,amorphous germanium, silicon carbide, gallium arsenide and silicongermanium. Besides, the first electrode layer 112 may be comprised ofmetal or metal compound including one or more of copper, tungsten,aluminum, silver, titanium, tantalum, titanium nitride and tantalumnitride.

Since the second base 110 is a body base, and the protective layer 111and the first electrode layer 112 are formed by a deposition process,the second base 110, the protective layer 111 and the first electrodelayer 112 may be comprised of materials of variety of selections, andmeets more fabrication process needs.

Referring to FIG. 3, the first electrode layer 112 (as shown in FIG. 2)is etched to form a pressure-sensing electrode 113.

In the embodiment, the second substrate 114 includes the second base110, the first electrode layer 112 and a pressure sensing region 180 inwhich the pressure-sensing electrode 113 is arranged. In addition, anelectrode interconnection layer may be formed by etching the firstelectrode layer 112, and the electrode interconnection layer iselectrically connected to the pressure-sensing electrode 113. A pressuresensing film is formed in the pressure sensing region 180 of the secondsubstrate 114.

The process of forming the pressure-sensing electrode 113 includes:forming a first patterned layer on a surface of the first electrodelayer 112, with a portion of the surface of the first electrode layer112 being exposed from the first patterned layer; etching the firstelectrode layer 112 with the first patterned layer being a mask untilthe surface of the protective layer 111 is exposed, to form apressure-sensing electrode 113; and removing the first patterned layerafter the first electrode layer is etched.

The first patterned layer is a patterned photoresist layer formed by aphotolithography process. Alternatively, the first patterned layer maybe a mask formed by a multi-pattern mask process, such as a Self-AlignedDouble Patterning (abbreviated to SADP) mask. The first patterned layermay be removed with a dry etching process or a wet etching process.

The first electrode layer 112 may be etched by an anisotropic dryetching process. In the embodiment, the first electrode layer 112 isetched until the surface of the protective layer 111 is exposed.

In the embodiment, the fixed electrode 140 in the first substrate 100(as shown in FIG. 1) and the pressure-sensing electrode 113 serve aselectrodes of a capacitor in the formed capacitive type pressure sensor.The pressure-sensing electrode 113 can be deformed with a change of apressure on the pressure-sensing electrode 113, and thus a capacitancebetween the pressure-sensing electrode 113 and the fixed electrode 140changes and an output electrical signal changes.

Referring to FIG. 4, a second bonding layer 117 is formed on the side ofthe third surface of the second substrate 114.

In the embodiment, the second substrate 114 includes the second base110, the protective layer 111, the pressure-sensing electrode 113 andthe second bonding layer 117. The second substrate 114 includes a thirdsurface 118 and a fourth surface 119, the third surface 118 is a surfaceof the second bonding layer 117 and the fourth surface 119 is a surfaceof the second base 110. In addition, the second substrate 114 includes apressure sensing region 180 in which the pressure-sensing electrode 113is arranged.

In the embodiment, the second bonding layer 117 is arranged on a surfaceof the pressure-sensing electrode 113 and a surface of the protectivelayer 111. The second bonding layer 117 is used to protect thepressure-sensing electrode 113. The second bonding layer 117 is bondedwith the first bonding layer 106 (as shown in FIG. 1) to bond the firstsubstrate 100 (as shown in FIG. 1) and the second substrate 114 witheach other. The surface of the second bonding layer 117 is flat, thatis, the third surface 118 of the second substrate 114 is flat. Inanother embodiment, only the first substrate 100 includes the firstbonding layer 106, or only the second substrate 114 includes the secondbonding layer 117.

The second bonding layer 117 may be comprised of one or more of aninsulating material, a metal material, a metal compound material and asemiconductor material. The insulating material includes silicon oxide,silicon nitride, silicon oxynitride, a low-k dielectric material or anultra low-k dielectric material. The metal material includes one or moreof copper, tungsten, aluminum, silver, titanium and tantalum. The metalcompound material includes one or two of titanium nitride and tantalumnitride. The semiconductor material includes one or more ofpolycrystalline silicon, amorphous silicon, polycrystalline germanium,amorphous germanium, silicon germanium and silicon carbide which aredoped with ions. The ions being doped include one or more of p-typeions, n-type ions, carbon ions, nitrogen ions, fluoride ions andhydrogen ions.

In an embodiment, the second bonding layer 117 may be comprised ofsilicon oxide. The process of forming the second bonding layer 117includes: depositing a second bonding film partially on the surface ofthe protective layer 111 and partially on the surface of thepressure-sensing electrode 113; and forming a second bonding layer 117by flattening the second bonding film by a chemical mechanical polishingprocess.

In the embodiment, at least one of the first bonding layer 106 and thesecond bonding layer 117 may be comprised of an insulating material.Alternatively, both the surface of the first bonding layer 106 and thesurface of the second bonding layer 117 may be comprised of aninsulating material. In the embodiment, after the first substrate 100and the second substrate 114 are bonded with each other, a firstconductive plug passing through the second substrate 114 from a fifthsurface of the second substrate 114 to a surface of the conductive layer103 is formed, and the conductive layer 103 can be electricallyconnected to the pressure-sensing electrode 113 via the first conductiveplug and a subsequently formed first conductive structure. Therefore, noadditional conductive layer is formed between a surface of the firstbonding layer 106 and a surface of the second bonding layer 117 whichare in contact with each other. In this case, the first bonding layer106 and the second bonding layer 117 may be comprised of various typesof material, and meets more fabrication process needs.

In another embodiment, the second substrate may not include a secondbonding layer and the first substrate 100 includes a first bondinglayer.

In another embodiment, a fixed electrode is formed in the secondsubstrate. The fixed electrode is arranged in the pressure sensingregion and opposite to the pressure-sensing electrode. A cavity isformed between pressure-sensing electrode and the fixed electrode. Inthe embodiment, it is unnecessary to form a fixed electrode in the firstsubstrate.

Before the second bonding layer is formed, a second dielectric layer isformed on a surface of the pressure-sensing electrode 113. A fixedelectrode is formed on a surface of the second dielectric layer. Acavity is formed by removing a portion of the second dielectric layerbetween the fixed electrode and the pressure-sensing electrode. In anembodiment, a second bonding layer is formed partially on the surface ofthe second dielectric layer and partially on a surface of the fixedelectrode after the cavity is formed. In another embodiment, the secondbonding layer may not be formed.

The process of forming the second dielectric layer includes: depositinga second dielectric film partially on the surface of thepressure-sensing electrode 113 and partially on the surface of theprotective layer 111; and flattening the second dielectric film to forma second dielectric layer. The second dielectric layer may be comprisedof silicon oxide, silicon nitride, silicon oxynitride, a low-kdielectric material or an ultra low-k dielectric material. The seconddielectric film may be filmed by a chemical vapor deposition process, aphysical vapor deposition process or an atomic layer deposition process.The second dielectric film is flattened by the chemical mechanicalpolishing process.

The cavity may be formed by an etching process including an isotropicetching process, and the isotropic etching process may be a wet etchingprocess or a dry etching process. Etching rates of the isotropic etchingprocess in various directions are similar to one another. Therefore, thesecond dielectric layer may be etched in a direction parallel to thesurface of the second substrate to remove a portion of the seconddielectric layer between the fixed electrode and the pressure-sensingelectrode. Several through holes may be formed in the fixed electrode toexpose a portion of a surface of the second dielectric surface. Theportion of second dielectric layer at the bottom of the through hole isetched in the etching process for forming the cavity, to remove theportion of the second dielectric layer between the fixed electrode andthe pressure-sensing electrode.

Referring to FIG. 5, a first opening 120 is formed from the thirdsurface 118 of the second substrate 114, and a location of the firstopening 120 corresponds to a location of the pressure pressure-sensingelectrode 113.

In the embodiment, since the fixed electrode 140 (as shown in FIG. 1) isformed in the first substrate 100 (as shown in FIG. 1), the firstopening 120 is formed from the third surface 118 of the second substrate114. When the first substrate 100 and the second substrate 114 arebonded, a cavity is formed between the third surface 118 and the firstsurface 101 of the first substrate 100. A pressure in the cavity may beone atmospheric pressure or other preset pressure values. The cavity mayserve as a dielectric between the pressure-sensing electrode 113 and thefixed electrode. A capacitance value of a capacitor structure formedwith the cavity, the pressure-sensing electrode 113 and the fixedelectrode 140 (as shown in FIG. 1) may change in a case that thepressure-sensing electrode 113 is deformed under an pressure, therebyoutputting an electrical signal changing as the pressure or stresschanges.

The process of forming the first opening 120 includes: forming apatterned layer on a surface of the second bonding layer 117; andetching the second bonding layer 117 with the patterned layer being amask to form a first opening 120 in the second bonding layer 117. Thepatterned layer may be a patterned photoresist layer. The etchingprocess may be a dry etching process, a wet etching process or acombination thereof.

In the embodiment, the surface of the pressure-sensing electrode 113 isexposed at the bottom of the first opening 120. In another embodiment,the surface of the pressure-sensing electrode 113 is not exposed at thebottom of the first opening 120, and the pressure-sensing electrode 113is protected.

In another embodiment, the first opening may be formed on the side ofthe first surface of the first substrate, and a location of the firstopening corresponds to the location of a pressure sensing region of thesecond substrate. In another embodiment, first openings may be formed onthe side of the first surface of the first substrate and the side of athird surface of the second substrate, with locations of the firstopenings corresponding to the location of the pressure sensing region.

Reference is made to FIG. 6. The first surface 101 of the firstsubstrate 100 and the third surface 118 of the second substrate arebonded with each other, and a cavity 121 is formed between the firstsubstrate 100 and the pressure sensing region 180 of the secondsubstrate 114.

In the embodiment, since the first opening 120 is formed from the thirdsurface 118 of the second substrate 114 (as shown in FIG. 5), the cavity121 is formed with the first opening 120 and the first surface 101 ofthe first substrate 100 when the first surface 101 of the substrate 100and the third surface 118 of the second substrate 114 are bonded witheach other.

In another embodiment, a first opening may be formed by etching thefirst surface 101 of the first substrate 100, with a location of thefirst opening corresponding to the pressure sensing region 180 in thesecond substrate 114. In this case, a cavity 121 is formed with thefirst opening and the third surface 118 of the second substrate 114 whenthe first surface 101 of the first substrate 100 and the third surface118 of the second substrate are bonded with each other.

In an embodiment, the first substrate 100 and the second substrate 114may be bonded with a direct-bonding process such as Fusion Bonding,Anodic Bonding, Eutectic Bonding or Thermal Compression Bonding. Inanother embodiment, the first substrate 100 and the second substrate 114may be bonded with each other by an adhesive bonding process, and thefirst substrate 100 and the second substrate 114 are bonded with anadhesive bonding layer. The adhesive bonding layer may be comprised ofan insulating material, a semiconductor material, a metal material or anorganic material. The first bonding layer or the second bonding layerserves as the adhesive bonding layer.

In the embodiment, the surface of the first bonding layer 106 is flat,and the surface of the second bonding layer 117 is flat. The surface ofthe first bonding layer 106 is the first surface of the first substrate100 and the surface of the second bonding layer 117 is the third surfaceof the second substrate 114. The surface of the first bonding layer 106is in contact and bonded with the surface of the second bonding layer117, so that the first substrate 100 and the second substrate 114 can bestacked and bonded with each other.

The cavity 121 between the first substrate 100 and the pressure sensingregion 180 of the second substrate 114 is formed as a pressure referencechamber, in a case that the first substrate 100 and the second substrate114 are bonded with each other. A pressure in the formed cavity 121 canbe adjusted by adjusting an ambient pressure in bonding the firstsubstrate 100 and the second substrate 114. After the second base 110 isremoved, a pressure difference exists between a pressure applied to asurface of the protective layer 111 and the pressure in the cavity 121.The pressure-sensing electrode 113 is deformed due to the pressuredifference. The deformation leads to a change in the capacitance betweenthe pressure-sensing electrode 113 and the fixed electrode 140, whichleads to a change in an electrical signal output from the capacitorstructure formed by the pressure-sensing electrode 113 and the fixedelectrode. Therefore, an output electrical signal changes with a changein the pressure difference between the external pressure and thepressure in the cavity 121, and an external pressure signal is detected.

Since the first surface 101 of the first substrate 100 is in contactwith the third surface 118 of the second substrate 114, and the firstsurface 101 and the third surface 118 are flat, the first surface 101 isin contact with the third surface 118 in a large area, a bondingstrength between the first substrate 100 and the second substrate 114 ishigh, and it is not easy to bend, break or deform a stacked structure ofthe first substrate 100 and the second substrate 114, thereby providinga more stable and reliable structure of the formed pressure sensor andimproving the durability of the formed pressure sensor.

Furthermore, except for the formed cavity 121, the first surface 101 ofthe first substrate 100 mostly is in contact with the third surface 118of the second substrate 114, and there is no extra space between thefirst surface 101 and the third surface 118. In this case, a distancefrom the fourth surface 119 of the second substrate 114 to the secondsurface 102 of the first substrate 100 is short, thereby reducing athickness and a size of the formed MEMS pressure sensor and improvingdevice integration

In addition, no additional conductive layer is necessary between thefirst surface 101 of the first substrate 100 and the third surface 118of the second substrate 114, since the conductive layer 103 iselectrically connected to the pressure-sensing electrode 113 by formingthe first conductive plug passing through the second substrate 114 fromthe fifth surface of the second substrate 114 to the conductive layer103. In this way, no excess stress is generated between the firstsurface 101 and the third surface 118 due to a thermal expansioncoefficient mismatch, thereby ensuring the accuracy of the electricalsignal output from the capacitor including the pressure-sensingelectrode 113.

The selection of materials of the first surface 101 of the firstsubstrate 100 and the third surface 118 of the second substrate 114 isflexible, and hence the first surface 101 and the third surface 118 maybe comprised of material with a small thermal expansion coefficientmismatch. In this case, no or minimal stress is generated due to theexcessive thermal expansion coefficient mismatch between the material ofthe first surface and the material of the third surface 118, therebyproviding a more stable structure of the formed MEMS pressure sensor andimproving the reliability and the accuracy the formed MEMS pressuresensor. In addition, the processes for the first substrate 100 and thesecond substrate 114 are more flexible, the fabrication process of theformed MEMS pressure sensor is more compatible with various fabricationprocesses of integrated conductive layers, and the fabrication cost isreduced.

Reference is made to FIG. 7. The second base 110 (as shown in FIG. 6) isremoved and a fifth surface 122 opposite to the third surface 118 of thesecond substrate is formed.

In the embodiment, since the protective layer 111 is located between thesecond base 110 and the pressure-sensing electrode 113, a surface of theprotective layer 111 is exposed after the second base 110 is removed.The protective layer 111 may be comprised of an insulating material, andcan protect and isolate the pressure-sensing electrode 113. Thecapacitance of the pressure-sensing electrode 113 changes due to adeformation of the pressure-sensing electrode 113 in a case that theprotective layer 111 is applied with a pressure.

The second base 110 may be removed by a chemical mechanical polishingprocess or an etching process, and the etching process includes a dryetching process, a wet etching process or a combination of dry etchingand wet etching. Since the second base 110 is removed from the fourthsurface 119 of the second substrate 114, a fifth surface 122, i.e. thesurface of the protective layer 111, is formed on the side of the secondsubstrate 114 opposite to the third surface 118 after the second base isremoved.

Reference is made to FIG. 8. A first conductive plug 123 passing throughthe second substrate 114 from the fifth surface 122 of the secondsubstrate 114 to the at least one conductive layer 103 is formed, andthe first conductive plug 123 is used to electrically connect theconductive layer 103 to the pressure-sensing electrode 113.

The first surface 101 of the first substrate 100 is in contact with thethird surface 118 of the second substrate 114, and no electricalconnection exists on the contacting interface between the first surface101 and the third surface 118 when at least one of the bonding layers isan insulator, hence the first conductive plug 123 needs to be formed.One end of the first conductive plug 123 is electrically connected tothe conductive layer 103 and the other end of the first conductive plug123 is exposed in the fifth surface 122 of the second substrate 114. Inthis case, a first conductive structure may be directly formed partiallyon the fifth surface 122 and partially in the second substrate 114, sothat the first conductive structure is electrically connected to thefirst conductive plug 123 and the pressure-sensing electrode 113, andthus the conductive layer 103 is electrically connected to thepressure-sensing electrode 113.

Since no electrical connection layer has to be made between the firstsurface 101 and the third surface 118, the first surface 101 is incontact with the third surface 118 in most regions other than a regionof the cavity 121, and a contact area between the first surface 101 andthe third surface 118 is large. In this case, the mechanical strength ofthe stacked structure of the first substrate 100 and the secondsubstrate 114 is higher after they are bonded, and it is difficult tobend or crack the stacked structure of the first substrate and thesecond substrate. In addition, no additional electrical connection layeris necessary between the first surface 101 and the third surface 118,the first surface 101 and the third surface 118 may be comprised ofmaterial with similar thermal expansion coefficients. In this case, noexcess stress or delamination is generated between the first substrate100 due to a thermal expansion coefficient mismatch, after the firstsubstrate 100 is bonded with the second substrate 114. Therefore, thestacked structure of the first substrate 100 and the second substrate114 has a more stable structure, a reduced size and a high adaptabilityof the fabrication process thereof.

The forming the first conductive plug 123 includes: forming a patternedlayer on the fifth surface 122 of the second substrate 114,with a regionwhere the first conductive plug 123 is formed being exposed from thepatterned layer; with the patterned layer as a mask, etching theprotective layer 111, the second bonding layer 117 and the first bondinglayer 106 until the surface of the conductive layer 103 is exposed, toform a first through hole in the protective layer 111, the secondbonding layer 117 and the first bonding layer 106; forming a conductivefilm partially on the fifth surface 122 and partially in the firstthrough hole, with the first through hole being filled with theconductive film; and removing a portion of the conductive film on thefifth surface 122 until the fifth surface 122 is exposed. In anembodiment, the conductive film on the fifth surface may be removedcompletely. In another embodiment, a portion of the conductive film maybe reserved on the fifth surface 122.

An end of the first conducive plug 123 may protrude from, be recessedinto or be flush with, the fifth surface 122 of the second substrate114.

In an embodiment, an insulating layer is formed on a surface of asidewall of the first through hole before the conductive film is formed,and then the conductive film filling up the first through hole is formedafter the insulating layer is formed.

The first conductive plug 123 may be comprised of copper, tungsten,aluminum, silver or gold. The conductive film may be formed by aphysical vapor deposition process, a chemical vapor deposition process,an atomic layer deposition process, an electroplating process or achemical plating process. The conductive film may be flattened by achemical mechanical polishing process. In addition, a first barrierlayer may be formed on the surface of the sidewall of the first throughhole, the conductive film is formed on a surface of the first barrierlayer, and the first barrier layer may be comprised of one or more oftitanium, tantalum, titanium nitride and tantalum nitride.

In the embodiment, a third conductive plug 124 passing through from thefifth surface 122 of the second substrate 114 to the electrodeinterconnection layer is formed. A first conductive structure issubsequently formed with the third conductive plug 124 and asubsequently-formed first conductive layer. The first conductivestructure is used to electrically connect the first conductive plug 123to the pressure-sensing electrode 113, and the pressure-sensingelectrode 113 is electrically connected to the conductive layer 103.

In the embodiment, a third through hole passing through the protectivelayer 111 is formed while the first through hole is formed. A surface ofthe electrode interconnection layer is exposed at the bottom of thethird through hole. The conductive film is formed in the third throughhole and fills up the third through hole, and then the third conductiveplug 124 is formed in the third through hole.

In an embodiment, an insulating layer may be formed on a surface of asidewall of the third through hole before the conductive film is formed,and then the conductive film filling up the third through hole is formedafter the insulating layer is formed.

In another embodiment, the third conductive plug 124 may be formedbefore or after the first conductive plug 123 is formed.

Referring to FIG. 9, a first conductive structure, which is electricallyconnected to the first conductive plug 123 and the pressure-sensingelectrode 113, is formed.

In the embodiment, the first conductive structure includes the thirdconductive plug 124 and the first conductive layer 125. The firstconductive layer 125 is arranged on the fifth surface 122 of the secondsubstrate 114 and is arranged on top surfaces of the first conductiveplug 123 and the third conductive plug 124. The third conductive plug124 is electrically connected to the electrode interconnection layer,the first conductive plug 123 is electrically connected to theconductive layer 103, and the first conductive layer 125 is electricallyconnected to the first conductive plug 123 and the third conductive plug124, and thus the pressure-sensing electrode 113 is electricallyconnected to the conductive layer 103.

The first conductive layer 125 may be comprised of metal or metalcompound, which includes one or more of copper, tungsten, aluminum,silver, titanium, tantalum, titanium nitride and tantalum nitride. Theforming the first conductive layer 125 includes: depositing a conductivematerial layer on the fifth surface 122 of the second substrate 114;forming a patterned layer on the conductive material layer with aportion of the surface of the conductive material layer being exposedfrom the patterned layer; etching the conductive material layer with thepatterned layer being a mask until the fifth surface 122 is exposed. Theconductive material layer may be formed by a chemical vapor depositionprocess, a physical vapor deposition process or an atomic layerdeposition process. The patterned layer is a patterned photoresistlayer. The conductive material layer may be etched by an anisotropic dryetching process.

The method for fabricating the MEMS pressure sensor according to theembodiment may be used to make devices suitable for multiple types ofpackaging, including Chip Scale Package (CSP), Quad Flat No-lead package(QFN), Dual flat no-lead package (DFN) or Small Outline IntegratedConductive layer package (SOIC).

Accordingly, the embodiment of the present disclosure further provides aMEMS pressure sensor formed according to the above method. Reference isstill made to FIG. 9. The MEMS pressure sensor includes: a firstsubstrate 100 and a second substrate 114. The first substrate 100includes a first surface 101 and a second surface 102 opposite to thefirst surface 101. The first substrate 100 includes at least oneconductive layer 103 arranged on the side of the first surface 101 ofthe first substrate 100. The second substrate 114 includes a thirdsurface 118 and a fifth surface 122 opposite to the third surface 118,the second substrate 114 includes a pressure-sensing electrode 113, andthe second substrate 114 includes a pressure sensing region 180 in whichthe pressure-sensing electrode 113 is arranged. The first surface 101 ofthe first substrate 100 and the third surface 118 of the secondsubstrate 114 are bonded with each other and a cavity 121 is formedbetween the first substrate 100 and the pressure sensing region 180 ofthe second substrate 114. A first conductive plug 123 passing throughthe second substrate 114 from the fifth surface 122 of the secondsubstrate 114 to the at least one conductive layer 103 is formed, toelectrically connect the conductive layer 103 and the pressure-sensingelectrode 113.

In the following, the above structure is described in detail.

In the embodiment, the first substrate 100 further includes a fixedelectrode 140 arranged on the side of the first surface 101 of the firstsubstrate 100. The fixed electrode 140 corresponds to thepressure-sensing electrode 113. The cavity 121 is formed between thepressure-sensing electrode 113 and the fixed electrode 140. In anembodiment, the first substrate 100 further includes a circuit.

In another embodiment, the second substrate further includes a fixedelectrode corresponding to the pressure-sensing electrode, and a cavityis formed between the pressure-sensing electrode and the fixedelectrode.

The second substrate 114 further includes a protective layer 111arranged partially on a surface of the pressure-sensing electrode 113and partially on a surface of the electrode interconnection layer, and asurface of the protection layer 111 is the fifth surface 122. Theprotective layer 111 may be comprised of an insulating material such assilicon oxide, silicon nitride, silicon oxynitride, a low-k dielectricmaterial or an ultra low-k dielectric material.

The pressure-sensing electrode 113 may be comprised of a semiconductormaterial, such as monocrystalline silicon, monocrystalline germanium,III-V group compound, II-VI group compound, polycrystalline silicon,amorphous silicon, polycrystalline germanium, amorphous germanium,silicon carbide or silicon germanium.

The first conductive structure includes a third conductive plug 124 anda first conductive layer 125. The third conductive plug 124 passesthrough the second substrate 114 from the fifth surface 122 of thesecond substrate 114 to the electrode interconnection layer, and thefirst conductive layer 125 is arranged on the fifth surface 122 of thesecond substrate 114 and on top surfaces of the first conductive plug123 and the third conductive plug 124.

The second substrate 114 further includes a second bonding layer 117arranged on the side of the third surface 118; or the first substrate100 includes a first bonding layer 106 arranged on the side of the firstsurface 101; or the second substrate 114 further includes a secondbonding layer 117 arranged on the side of the third surface 118 and thefirst substrate 100 includes a first bonding layer 106 arranged on theside of the first surface 101. The first bonding layer 106 or the secondbonding layer 117 may be comprised of one or more of an insulatingmaterial, a metal material, a metal compound material and asemiconductor material. In an embodiment, at least one of the firstbonding layer 106 and the second bonding layer 117 is comprised of aninsulating material.

In an embodiment, the first bonding layer 106 or the second bondinglayer 117 is an adhesive bonding layer, which may be comprised of aninsulating material, a semiconductor material, a metal material or anorganic material. In another embodiment, the first bonding layer 106 isa bonding layer; or, the second bonding layer 117 is a bonding layer;or, the first bonding layer 106 and the second bonding layer 117 arebonding layers.

Second Embodiment

FIGS. 10 to 11 are schematic cross-sectional diagram of a MEMS pressuresensor in a fabrication process according to an embodiment of thepresent disclosure.

Referring to FIG. 10, a first substrate 200 is prepared. The firstsubstrate 200 includes a first surface 201 and a second surface 202opposite to the first surface 201. The first substrate 200 includes aself-test electrode 230, and at least one conductive layer 203 arrangedon the side of the first surface 201 of the first substrate 200.

The first substrate 200 further includes a fixed electrode 240 arrangedon the side of the first surface 201 of the first substrate 200. Whenthe first surface 201 of the first substrate 200 and a third surface ofa second substrate are bonded with each other, the fixed electrode 240corresponds to the pressure-sensing electrode and a cavity is formedbetween the pressure-sensing electrode and the fixed electrode 240.

In addition, the first substrate 200 further includes a circuitincluding a semiconductor device structure and an electricalinterconnection structure. The conductive layer 203 may be a conductivelayer of the circuit, or, may be a conductive layer added to thecircuit. The conductive layer may include a conductor or asemiconductor.

In the embodiment, the conductive layer 203 is formed on the first base204, and a first dielectric layer 205 is arranged between the conductivelayer 203 and the first base 204. The first substrate 200 may include afirst bonding layer 206 arranged on the side of the first surface 201.The first base 204, the first dielectric layer 205, the conductive layer203 and the first bonding layer 206 are the same as those described inconjunction with FIG. 1 according to the previous embodiment, which arenot described herein.

A location of the self-test electrode 230 and a location of the fixedelectrode 240 correspond to a location of a pressure sensing region ofthe second substrate. In the embodiment, the self-test electrode 230 isformed on a surface of the first dielectric layer. Since the location ofthe self-test electrode 230 and the location of the fixed electrode 240correspond to the location of the pressure sensing region in the secondsubstrate, that is, the self-test electrode 230 and the fixed electrode240 are arranged corresponding to the pressure-sensing electrode afterthe first substrate 200 and the second substrate are bonded with eachother.

In the embodiment, the self-test electrode 230 is located in the samelayer as the conductive layer 203. In another embodiment, the self-testelectrode 230 may be higher or lower than the conductive layer 203. Inthe embodiment, the self-test electrode 230 is located in the same layeras the fixed electrode 240. In another embodiment, the self-testelectrode 230 may be higher or lower than the fixed electrode 240.

After the first substrate 200 and the second substrate are bonded, theself-test electrode 230 may generate an electrostatic pull on thepressure sensing region of the second substrate when a bias voltage isapplied to the self-test electrode 230, the pressure sensing region ofthe second substrate is a pressure sensing film and the pressure sensingfilm may be deformed due to the electrostatic pull. It is detectedwhether the pressure-sensing electrode works normally by detectingwhether the electrostatic pull leads to a change in a capacitance of thecapacitor including the pressure-sensing electrode.

The self-test electrode 230 may be comprised of a metal material, ametal compound material or a semiconductor material doped with ions. Theforming the self-test electrode 230 includes: depositing an electrodematerial layer on a surface of the first dielectric layer 205; forming apatterned layer on a surface of the electrode material layer, with aportion of the surface of the electrode material layer being exposedfrom the patterned layer; etching the electrode material layer with thepatterned layer being a mask until the surface of the first dielectriclayer 205 is exposed. The electrode material layer may be formed by achemical vapor deposition process, a physical vapor deposition processor an atomic layer deposition process. The patterned layer is apatterned photoresist layer. The electrode material layer may be etchedby an anisotropic dry etching process. In the embodiment, the self-testelectrode 230, the conductive layer 203 and the fixed electrode 240 areformed simultaneously. In another embodiment, the self-test electrodemay be formed before or after the conductive layer 203 is formed, or maybe formed before or after the fixed electrode is formed.

Reference is made to FIG. 11. A second substrate 214 is prepared. Thesecond substrate 214 includes a third surface 218 and a fourth surfaceopposite to the third surface 218. The second substrate 214 includes asecond base and a pressure-sensing electrode 213 arranged on or abovethe second base. The second substrate 214 includes a pressure sensingregion 280 in which the pressure-sensing electrode 213 is arranged. Thepressure-sensing electrode is arranged on the side of the third surface218 of the second substrate 214. The first surface 201 of the firstsubstrate 200 and the third surface 218 of the second substrate 214 arebonded with each other, and a cavity 221 is formed between the firstsubstrate 200 and the pressure sensing region 280 of the secondsubstrate 214. The second base is removed to form a fifth surface 222opposite to the third surface 218 of the second substrate 214. A firstconductive plug 223 passing through the second substrate 214 from theside of the fifth surface 222 of the second substrate 214 to the atleast one conductive layer 203 is formed, and the first conductive plug223 is used to electrically connect the conductive layer 203 to thepressure-sensing electrode 213.

In the embodiment, after the first surface 201 of the first substrate200 and the third surface 218 of the second substrate 214 are bondedwith each other, the location of the self-test electrode 230 correspondsto the location of the pressure sensing region 280. In this case, theself-test electrode 230 can apply an electrostatic pull to thepressure-sensing electrode 213 to detect whether the pressure-sensingelectrode works normally.

In the embodiment, the second substrate 214 further includes aprotective layer 211 and a first conductive structure. The firstconductive structure includes a third conductive plug 224 and a firstconductive layer 225.

Steps of: preparing the second substrate 214; bonding the firstsubstrate 200 and the second substrate 214 with each other; removing thesecond base; forming the first conductive plug 223 and forming the firstconductive structure are the same as those described in conjunction withFIGS. 2 to FIG. 9 according to the previous embodiment, which are notdescribed herein.

Accordingly, the embodiment of the present disclosure further provides aMEMS pressure sensor formed with the above method. Reference is stillmade to FIG. 11. The MEMS pressure sensor includes a first substrate 200and a second substrate 214. The first substrate 200 includes a firstsurface 201 and a second surface 202 opposite to the first surface 201.The first substrate 200 includes a self-test electrode 230, and at leastone conductive layer 203 arranged on the side of the first surface 201of the first substrate 200. The second substrate 214 includes a thirdsurface 218 and a fifth surface 222 opposite to the third surface 218.The second substrate 214 includes a pressure-sensing electrode 213. Thesecond substrate 214 includes a pressure sensing region 280 in which thepressure-sensing electrode is arranged. The first surface 201 of thefirst substrate 200 and the third surface 218 of the second substrate214 are bonded with each other and a cavity 221 is formed between theconductive layer 203 and the pressure-sensing electrode 213. Thelocation of the self-test electrode 230 corresponds to the location ofthe pressure sensing region 280. A first conductive plug 223 passingthrough the second substrate 214 from the fifth surface 222 of thesecond substrate 214 to the at least one conductive layer 203 is formed,and the first conductive plug 223 is used to electrically connect theconductive layer 203 and the pressure-sensing electrode 213.

In the embodiment, the first substrate 200 further includes a fixedelectrode 240 arranged on the side of the first surface 204 of the firstsubstrate 200. When the first surface 204 of the first substrate 200 andthe third surface 218 of the second substrate 214 are bonded with eachother, the fixed electrode 240 corresponds to the pressure-sensingelectrode 213, and the cavity 221 is formed between the pressure-sensingelectrode 213 and the fixed electrode 240.

The first substrate 200, the second substrate 214, the pressure-sensingelectrode 213, the first conductive plug 223 and the first conductivestructure are the same as those described in the previous embodiment,which are not described herein.

The self-test electrode 230 may be comprised of a metal material, ametal compound material or a semiconductor material doped with ions. Themetal material includes one or more of copper, tungsten, aluminum,silver, titanium and tantalum. The metal compound material includes oneor two of titanium nitride and tantalum nitride. The semiconductormaterial includes one or more of polycrystalline silicon, amorphoussilicon, polycrystalline germanium, amorphous germanium, silicongermanium and silicon carbide which are doped with ions. The ions beingdoped include p-type ions, n-type ions, carbon ions, nitrogen ions,fluoride ions and hydrogen ions.

When a bias voltage is applied to the self-test electrode 230, theself-test electrode 230 can generate an electrostatic pull on thepressure-sensing electrode 213, and the pressure sensing film can bedeformed due to the electrostatic pull. It may be detected whether thepressure-sensing electrode 213 works normally by detecting whether theelectrostatic pull leads to a change in a capacitance of the capacitorincluding the pressure-sensing electrode 213.

Third Embodiment

FIGS. 12 to FIG. 15 are schematic cross-sectional diagrams of a MEMSpressure sensor in a fabrication process according to an embodiment ofthe present disclosure.

Referring to FIG. 12, a second substrate 314 is prepared. The secondsubstrate 314 includes a third surface 318 and a fourth surface 319opposite to the third surface 318. The second substrate 314 includes asecond base 310 and a pressure-sensing electrode 313 arranged on orabove the second base 310. The second substrate 314 includes a pressuresensing region 380 and a reference unit region 331. The pressure-sensingelectrode 313 is arranged on the side of the third surface 318 of thesecond substrate 314 and is arranged in the pressure sensing region 380.

A pressure-sensing electrode 313 is further formed in the reference unitregion 331.

In the embodiment, the second substrate 314 further includes a secondbonding layer 317 arranged on the side of the third surface 318 of thesecond substrate 314, and the second bonding layer 317 includes firstopenings 320. The first openings 320 are formed in the pressure sensingregion 380 and the reference unit region 331. The first openings 320 areused to form cavities in the pressure sensing region 380 and thereference unit region 331 after the first substrate and the secondsubstrate 314 are bonded.

The second substrate 314 and the pressure-sensing electrode 313 are thesame as those described in conjunction with FIGS. 2 to FIG. 5 accordingto the previous embodiment, which are not described herein.

Referring to FIG. 13, a first substrate 300 is prepared. The firstsubstrate 300 includes a first surface 301 and a second surface 302opposite to the first surface 301. The first substrate 300 includes atleast one conductive layer 303 arranged on the side of the first surface301 of the first substrate 300. The first surface 301 of the firstsubstrate 300 and the third surface 318 of the second substrate 314 arebonded with each other. A cavity 321 is formed between the firstsubstrate 300 and the pressure sensing region 380 of the secondsubstrate 314, and a cavity 321 is formed between the first substrate300 and the reference unit region 331 of the second substrate 314. Adeformation on a portion of the second substrate 314 corresponding tothe reference unit region 331 is less than a deformation on a portion ofthe second substrate 314 corresponding to the pressure sensing region380, under a same external pressure.

In the embodiment, the first substrate 300 further includes a fixedelectrode 340 arranged on the side of the first surface 301 of the firstsubstrate 300. When the first surface 301 of the first substrate 300 andthe third surface 318 of the second substrate 314 are bonded with eachother, the fixed electrode 340 corresponds to the pressure-sensingelectrode 313 and the cavity 321 is formed between the pressure-sensingelectrode 313 and the fixed electrode 340.

A first base 304 is the same as that described in conjunction with FIG.1 according to the previous embodiment, which is not described herein. Astep of bonding the first surface 301 of the first substrate 300 and thethird surface 318 of the second substrate 314 with each other is thesame as the step described in conjunction with FIG. 6 according to theprevious embodiment, which is not described herein.

The pressure sensing region 380 of the second substrate 314 and thereference unit region 331 of the second substrate 314 each include thefirst opening in the second bonding layer 317. In this case, thecavities 321 may be formed in the pressure sensing region 380 and thereference unit region with the first openings and the first surface 301of the first substrate 300.

Since a cover layer is formed in a later step on a portion of the fifthsurface of the second substrate 314 corresponding to the reference unitregion 331, a change in a capacitance of a capacitor including thepressure-sensing electrode 313 in the reference unit region 331 due toan external pressure can be avoided or reduced, and the capacitance ofthe pressure-sensing electrode 313 in the reference unit region 331 maychange due to factors other than pressure. An electrical signalgenerated due to the external pressure can be obtained by subtracting anelectrical signal output from the pressure-sensing electrode 313 in thereference unit region 331 from an electrical signal output from thepressure-sensing electrode 313 in the pressure sensing region 380.Therefore, the accuracy of the formed MEMS pressure sensor is improved.

Referring to FIG. 14, the second base 310 (shown in FIG. 13) is removedto form a fifth surface 322 opposite to the third surface 318 of thesecond substrate 314. A first conductive plug 323 passing through thesecond substrate 314 from the fifth surface 122 of the second substrate314 to the at least one conductive layer 303 is formed. The firstconductive plug 323 is used to electrically connect the conductive layer303 to the pressure-sensing electrode 313.

In the embodiment, a first conductive structure includes a thirdconductive plug 324 and a first conductive layer 325.

A step of removing the second base 310 is the same as the step describedin the previous embodiment, which is not described herein. Steps offorming the first conductive plug 323 and the first conductive structureare the same as steps described in the previous embodiment, which arenot described herein.

Referring to FIG. 15, a cover layer 332 is formed on a portion of thefifth surface 322 of the second substrate 314 corresponding to thereference unit region 331, after the second base 310 (as shown in FIG.13) is removed.

The cover layer 331 is comprised of an insulating material. The coverlayer 332 can protect the pressure-sensing electrode 313 in thereference unit region 331 from being affected by an external force sincethe cover layer 331 has a high stiffness.

The forming the cover layer 332 includes: depositing a cover filmpartially on the fifth surface 322 and partially on a surface of thefirst conductive structure; forming a patterned layer on a surface ofthe cover film; and etching the cover film with the patterned layerbeing a mask until a portion of the fifth surface 322 located in thepressure sensing region 380 is exposed. The cover layer 232 may becomprised of one or more of silicon oxide, silicon nitride, siliconoxynitride, amorphous carbon, polycrystalline silicon, amorphoussilicon, polycrystalline germanium and amorphous germanium. The coverfilm may be formed by a chemical vapor deposition process, a physicalvapor deposition process or an atomic layer deposition process. Thecover film may be etched by an anisotropic dry etching process.

Since the cover layer 332 is formed on a portion of the fifth surface322 of the second substrate 314 corresponding to the reference unitregion 331, the capacitance of the pressure-sensing electrode 313 in thereference unit region 331 may show less or no change in response to anexternal pressure, but it may change due to factors other than pressure.An electrical signal generated due to the external pressure can beobtained by subtracting the electrical signal output by thepressure-sensing electrode 313 in the reference unit region 331 from theelectrical signal output by the pressure-sensing electrode 313 in thepressure sensing region 380.

Accordingly, the embodiment of the present disclosure further provides aMEMS pressure sensor formed with the above method. Reference is stillmade to FIG. 15, the MEMS pressure sensor includes a first substrate 300and the second substrate 314. The first substrate 300 includes a firstsurface 301 and a second surface 302 opposite to the first surface 301.The first substrate 300 includes at least one conductive layer 30arranged on the side of the first surface 301 of the first substrate300. The second substrate 314 includes a third surface 318 and a fifthsurface 322 opposite to the third surface 318. The second substrate 314includes a pressure-sensing electrode 313. The second substrate 314includes a pressure sensing region 380 and a reference unit region 331.The pressure-sensing electrodes 313 are arranged in the pressure sensingregion 380 and the reference unit region 331. The first surface 301 ofthe first substrate 300 and the third surface 318 of the secondsubstrate 314 are bonded with each other. A cavity 321 is formed betweenthe first substrate 300 and the pressure sensing region 380 of thesecond substrate 314, and a cavity 321 is formed between the firstsubstrate 300 and the reference unit region 331 of the second substrate314. A first conductive plug 323 passing through the second substrate314 from the fifth surface 322 of the second substrate 314 to the atleast one conductive layer 303 is formed, and a first conductivestructure electrically connected to the first conductive plug 323 andthe pressure-sensing electrodes 313 is formed. The first conductive plug323 is used to electrically connect the conductive layer 303 to thepressure-sensing electrode 313.

In the embodiment, the first substrate 300 further includes a fixedelectrode 340 arranged on the side of the first surface 301 of the firstsubstrate 300. The fixed electrode 340 corresponds to thepressure-sensing electrode 313 and the cavity 321 is formed between thepressure-sensing electrode 313 and the fixed electrode 340.

The cover layer 332 may be comprised of one or more of silicon oxide,silicon nitride, silicon oxynitride, amorphous carbon, polycrystallinesilicon, amorphous silicon, polycrystalline germanium and amorphousgermanium.

The first substrate 300, the second substrate 314, the pressure-sensingelectrode 313, the fixed electrode 340, the conductive layer 303, thefirst conductive plug 323 and the first conductive structure are thesame as those described in conjunction with FIG. 9 according to theprevious embodiment, which are not described herein.

Fourth Embodiment

FIGS. 16 to FIG. 17 are schematic cross-sectional diagram of a MEMSpressure sensor in a fabrication process according to an embodiment ofthe present disclosure.

Referring to FIG. 16, a first substrate 400 is prepared. The firstsubstrate 400 includes a first surface 401 and a second surface 402opposite to the first surface 401. The first substrate 400 includes afirst base 404, and at least one conductive layer 403 arranged on theside of the first surface 401 of the first substrate 400. A secondopening 450 in the first substrate 400 is formed.

In the embodiment, the first substrate 400 further includes a fixedelectrode 440 arranged on the side of first surface 401 of the firstsubstrate 400.

The forming the second opening 450 includes: forming a patterned layeron the second surface 402 of the first substrate 400, with a locationwhere the second opening is to be formed being exposed from thepatterned layer; etching the first substrate 400 with the patternedlayer being a mask until the first substrate 400 is passed through, toform a second opening 450. The patterned layer is a patternedphotoresist layer, and the etching process includes an anisotropic dryetching process.

The first substrate 400, and the first base 404 and the conductive layer403 of the first substrate 400 are the same as those described inconjunction with FIG. 1 according to the previous embodiment, which arenot described herein.

Referring to FIG. 17, a second substrate 414 is prepared. The secondsubstrate 414 includes a third surface 418 and a fourth surface oppositeto the third surface 418. The second substrate 414 includes a secondbase and a pressure-sensing electrode 413 arranged on or above thesecond base. The second substrate 414 includes a pressure sensing region480 in which the pressure-sensing electrode 413 is arranged. Thepressure-sensing electrode 413 is arranged on the side of the thirdsurface 418 of the second substrate 414. The first surface 401 of thefirst substrate 400 and the third surface 418 of the second substrate414 are bonded with each other, and a cavity 421 between the firstsubstrate 400 and the pressure sensing region 480 of the secondsubstrate 414. The second base is removed to form a fifth surface 422opposite to the third surface 418 of the second substrate 414. A firstconductive plug 423 passing through the second substrate 414 from theside of the fifth surface 422 of the second substrate 414 to the atleast one conductive layer 403 is formed, and the first conductive plug423 is used to electrically connect the conductive layer 403 to thepressure-sensing electrode 418.

When the first surface 401 of the first substrate 400 and the thirdsurface 418 of the second substrate 414 are bonded with each other, thefixed electrode 440 corresponds to the pressure-sensing electrode 413,and the cavity is formed between the pressure-sensing electrode 413 andthe fixed electrode 440.

In the embodiment, a first conductive structure electrically connectedto the first conductive plug 423 and the pressure-sensing electrode 413is formed. The first conductive structure includes a third conductiveplug 424 and a first conductive layer 425.

Material, structures and fabrication steps and fabrication processes ofthe second substrate 414 are the same as those described in conjunctionwith FIGS. 2 to FIG. 5 according to the previous embodiment; a step ofbonding the first substrate 400 and the second substrate 414 with eachother is the same as that described in conjunction with FIG. 6 accordingto the previous embodiment; a step of removing the second base is thesame as that described in conjunction with FIG. 7 according to theprevious embodiment; and steps of forming the first conductive plug 423and the first conductive structure are the same as those described inthe previous embodiment; which are not described herein.

After the first surface 401 of the first substrate 400 and the thirdsurface 418 of the second substrate 414 are bonded with each other, alocation of the second opening 450 corresponds to a location of thepressure sensing region 480 of the second substrate. Therefore, thesecond opening 450 is in communication with the cavity 421, and twosides of the pressure sensing film are exposed to the externalenvironment.

Since the second opening 450 is exposed to the external environment,pressures from the external environment are obtained on both sides ofthe pressure sensing film. In a case that the pressures on the two sidesof the pressure sensing film are different, the pressure sensing film isdeformed and a capacitance of the pressure-sensing electrode 413changes. Therefore, the pressure-sensing electrode 413 according to theembodiment can acquire a differential pressure signal for the two sides,and the formed MEMS pressure sensor may serve as a differential pressuresensor.

Accordingly, the embodiment of the present disclosure further provides aMEMS pressure sensor formed with the above method. Reference is stillmade to FIG. 17. The MEMS pressure sensor includes a first substrate 400and a second substrate 414. The first substrate 400 includes a firstsurface 401 and a second surface 402 opposite to the first surface 401.The first substrate 400 includes at least one conductive layer 403arranged on the side of the first surface 401 of the first substrate400. The second substrate 414 includes a third surface 418 and a fifthsurface 422 opposite to the third surface 418. The second substrate 414includes a pressure-sensing electrode 413. The second substrate 414includes a pressure sensing region 480 in which the pressure-sensingelectrode is arranged. The first surface 401 of the first substrate 400and the third surface 418 of the second substrate 414 are bonded witheach other and a cavity 421 is formed between the first substrate 400and the pressure sensing region 480 of the second substrate 414. A firstconductive plug 423 passing through the second substrate 414 from thefifth surface 422 of the second substrate 414 to a surface of the atleast one conductive layer 403 is formed, and the first conductive plug423 is used to electrically connect the conductive layer 403 to thepressure-sensing electrode 413.

In the embodiment, the first substrate 400 further includes a fixedelectrode 440 arranged on the side of the first surface 404 of the firstsubstrate 400. The fixed electrode 440 corresponds to thepressure-sensing electrode 413 and the cavity 421 is formed between thepressure-sensing electrode 413 and the fixed electrode 440.

In the embodiment, the MEMS pressure sensor further includes a firstconductive structure electrically connected to the first conductive plug423 and the pressure-sensing electrode 413, and a second opening 450passing through the first substrate 400. A location of the secondopening 450 corresponds to a location of the pressure sensing region 480of the second substrate 414.

Fifth Embodiment

FIGS. 18 to FIG. 20 are schematic cross-sectional diagrams of a MEMSpressure sensor in a fabrication process according to an embodiment ofthe present disclosure.

Referring to FIG. 18, a first substrate 500 and a second substrate 514are prepared. The first substrate 500 includes a first surface 501 and asecond surface 502 opposite to the first surface 501. The firstsubstrate 500 includes at least one conductive layer 503 arranged on theside of the first surface 501 of the first substrate 500. The secondsubstrate 514 includes a third surface 518 and a fourth surface 519opposite to the third surface 518. The second substrate 514 includes asecond base 510 and a pressure-sensing electrode 513 arranged on orabove the second base 510. The second substrate 514 includes a pressuresensing region 580 in which the pressure-sensing electrode 513 isarranged. The pressure-sensing electrode is arranged on the side of thethird surface 518 of the second substrate 514. The first surface 501 ofthe first substrate 500 and the third surface 518 of the secondsubstrate 514 are bonded with each other and a cavity 521 is formedbetween the first substrate 500 and the pressure sensing region 580 ofthe second substrate 514.

In the embodiment, the first substrate 500 further includes a fixedelectrode 540 arranged on the side of the first surface 501 of the firstsubstrate 500. When the first surface 501 of the first substrate 500 andthe third surface 518 of the second substrate 514 are bonded with eachother, the fixed electrode 540 corresponds to the pressure-sensingelectrode 513 and the cavity 521 is formed between the pressure-sensingelectrode 513 and the fixed electrode 514.

In another embodiment, the second substrate further includes a fixedelectrode corresponding to the pressure-sensing electrode, and thecavity is formed between the pressure-sensing electrode and the fixedelectrode.

In the embodiment, the first substrate 500 includes a first bondinglayer 506 arranged on the side of the first surface 501.

In an embodiment, the first substrate 500 further includes a self-testelectrode. A location of the self-test electrode corresponds to alocation of the pressure sensing region 580 of the second substrate 514after the first surface 501 of the first substrate 500 and the thirdsurface 518 of the second substrate 514 are bonded with each other.

The second substrate 514 further includes a protective layer 511arranged on a surface of the second base 510, and the pressure-sensingelectrode 513 is arranged on a surface of the protective layer 511. Inan embodiment, the forming the second substrate 514 includes: preparinga semiconductor-on-insulator substrate, which includes a base, ainsulating layer arranged on a surface of the base and a semiconductorlayer arranged on a surface of the insulating layer; forming a firstpatterned layer on a surface of the semiconductor layer, with a portionof the surface of the semiconductor layer be exposed from the firstpatterned layer; etching the semiconductor layer with the firstpatterned layer being a mask to form a pressure-sensing electrode 513,where the base is the second base 510 and the insulating layer is theprotective layer 511; and removing the first patterned layer after thesemiconductor layer is etched. An electrode interconnection layer may beformed by etching the semiconductor layer, and the electrodeinterconnection layer is electrically connected to the pressure-sensingelectrode 513. In another embodiment, the second base 510 may be a bodybase.

The second substrate 514 further includes a second bonding layer 517arranged on the side of the third surface 518. In an embodiment, atleast one of the first bonding layer 506 and the second bonding layer517 may be comprised of an insulating material.

In an embodiment, the first surface 501 of the first substrate 500 andthe third surface 518 of the second substrate 514 are bonded with eachother by a direct-bonding process. In another embodiment, the firstsurface 501 of the first substrate 500 and the third surface 518 of thesecond substrate 514 are bonded with each other by an adhesive bondingprocess. The first bonding layer 506 or the second bonding layer 517 isan adhesive bonding layer which may be comprised of an insulatingmaterial, a semiconductor material, a metal material or an organicmaterial.

In an embodiment, the second substrate 514 further includes a sensingunit region and a reference unit region, and the cavities 521 are formedin the sensing unit region and the reference unit region.

In an embodiment, the forming the cavity 521 includes: forming a firstopening from the third surface 518 of the second substrate 514 beforethe first surface 501 of the first substrate 500 and the third surface518 of the second substrate 514 are bonded with each other, with alocation of the first opening corresponding to a location of thepressure sensing region 580 of the second substrate 514; and forming acavity 521 with the first opening and the first surface 501 of the firstsubstrate 500 after the first surface 501 of the first substrate 500 andthe third surface 518 of the second substrate 514 are bonded with eachother.

In an embodiment, a second opening passing through the first substrate500 is formed. A location of the second opening corresponds to alocation of the pressure sensing region 580 of the second substrate 514after the first surface 501 of the first substrate 500 and the thirdsurface 518 of the second substrate 514 are bonded with each other.

In the embodiment, the first substrate 500, the second substrate 514 anda step of bonding the first substrate 500 and the second substrate 514with each other are the same as those described in conjunction withFIGS. 1 to FIG. 6 according to the previous embodiments, which are notdescribed herein.

Referring to FIG. 19, the second substrate 514 is thinned from thefourth surface 519 (shown in FIG. 18) by partially removing the secondbase 510, to form a fifth surface 522 opposite to the third surface 518of the second substrate 514.

The second base 510 may be thinned from the fourth surface 519 by achemical mechanical polishing process. In the embodiment, the fourthsurface 519 of the second substrate 514 is a surface of the second base510, and hence the second base 510 is thinned by the chemical mechanicalpolishing process. The pressure-sensing electrode 513 and the protectivelayer 511 are protected by a portion of the second base 510 not beingthinned and located on a surface of the protective layer 511, after thesecond base 510 is thinned.

In an embodiment, the second substrate 514 further includes a sensingunit region and a reference unit region, cavities 521 are formed in thesensing unit region and the reference unit region, and a cover layer isformed on a portion of the fifth surface 522 of the second substrate 514corresponding to the reference unit region after the second base 510 isthinned.

Referring to FIG. 20, a first conductive plug 523 passing through thesecond substrate 514 from the side of the fifth surface 522 of thesecond substrate 514 to the at least one conductive layer 503 is formed,and the first conductive plug 523 is used to electrically connect theconductive layer 503 to the pressure-sensing electrode 513.

The first conductive plug 523 electrically connects the conductive layer503 to the pressure-sensing electrode 513 via a first conductivestructure. The first conductive structure includes a third conductiveplug 524 passing through the second substrate 514 from the fifth surface522 of the second substrate 514 to an electrode interconnection layer,and a first conductive layer 525 arranged partially on the fifth surface522 of the second substrate and partially on top surfaces of the firstconductive plug 523 and the third conductive plug 524. An insulatinglayer may further be formed between the first conductive layer 525 andthe second base 510.

Material, structures and fabrication steps of the first conductivestructure and the first conductive plug 523 are the same as thosedescribed in conjunction with FIGS. 8 and FIG. 9 according to theprevious embodiment, which are not described herein.

Accordingly, the embodiment of the present disclosure further provides aMEMS pressure sensor formed with the above method. Reference is stillmade to FIG. 20. The MEMS pressure sensor includes a first substrate 500and a second substrate 514. The first substrate 500 includes a firstsurface 501 and a second surface 502 opposite to the first surface 501.The first substrate 500 includes at least one conductive layer 503 closeto the first surface 501 of the first substrate 500. The secondsubstrate 514 includes a third surface 518 and a fifth surface 522opposite to the third surface 518. The second substrate 514 includes asecond base 510 and a pressure-sensing electrode 513 arranged on orabove the second base 510. The second substrate 514 includes a pressuresensing region 580 in which the pressure-sensing electrode 513 isarranged. The pressure-sensing electrode 513 is arranged on the side ofthe third surface 518 of the second substrate 514. The first surface 501of the first substrate 500 and the third surface 518 of the secondsubstrate 514 are bonded with each other, and a cavity 521 is formedbetween the first substrate 500 and the pressure sensing region 580 ofthe second substrate 514. A first conductive plug 523 passing throughthe second substrate 514 from the side of the fifth surface 522 of thesecond substrate 514 to the at least one conductive layer 503 is formed,and the first conductive plug 523 is used to electrically connect theconductive layer 503 to the pressure-sensing electrode 513.

In the following, the above structure is described in detail.

In the embodiment, the first substrate 500 further includes a fixedelectrode 540 arranged on the side of the first surface 501 of the firstsubstrate 500, the fixed electrode 540 corresponds to thepressure-sensing electrode 513, and the cavity 521 is formed between thepressure-sensing electrode 513 and the fixed electrode 540.

In another embodiment, the second substrate further includes a fixedelectrode corresponding to the pressure-sensing electrode, and thecavity is formed between the pressure-sensing electrode and the fixedelectrode.

The second substrate 514 further includes a protective layer 511arranged on a surface of the pressure-sensing electrode 513, and asurface of the protective layer 511 is the fifth surface 522.

The first conductive plug 523 is electrically connected to theconductive layer 503 and the pressure-sensing electrode 513 via a firstconductive structure. The first conductive structure includes a thirdconductive plug 524 passing through the second substrate 514 from thefifth surface 522 of the second substrate 514 to the electrodeinterconnection layer, and a first conductive layer 525 arranged on thefifth surface 522 of the second substrate 514. The first conductivelayer is also arranged on top surfaces of the first conductive plug 523and the third conductive plug 524.

The second substrate 514 further includes a second bonding layer 517arranged on the side of the third surface 518. Alternatively, the firstsubstrate 500 includes a first bonding layer 506 arranged on the side ofthe first surface 501. Alternatively, the second substrate 514 furtherincludes a second bonding layer 517 arranged on the side of the thirdsurface 518 and the first substrate 500 includes a first bonding layer506 arranged on the side of the first surface 501.

In an embodiment, at least one of the first bonding layer 506 and thesecond bonding layer 517 may be comprised of an insulating material.

In an embodiment, the first substrate 500 further includes a circuit.

In an embodiment, the first bonding layer 506 or the second bondinglayer 507 is an adhesive bonding layer which may be comprised of aninsulating material, a semiconductor material, a metal material or anorganic material.

In another embodiment, the first bonding layer 506 is a bonding layer;or the second bonding layer 517 is a bonding layer; or the first bondinglayer 506 and the second bonding layer 517 are bonding layers.

Sixth Embodiment

FIGS. 21 to FIG. 23 are schematic cross-sectional diagrams of a MEMSpressure sensor in a fabrication process according to an embodiment ofthe present disclosure.

Referring to FIG. 21, a first substrate 600 and a second substrate 614are prepared. The first substrate 600 includes a first surface 601 and asecond surface 602 opposite to the first surface 601. The firstsubstrate 600 includes a first base 604, and at least one conductivelayer 603 arranged on the side of the first surface 601 of the firstsubstrate 600. The second substrate 614 includes a third surface 618 anda fourth surface opposite to the third surface 618. The second substrate614 includes a second base 610 and a pressure-sensing electrode 613arranged on or above the second base 610. The second substrate 614includes a pressure sensing region 680 in which the pressure-sensingelectrode 613 is arranged. The pressure-sensing electrode 613 isarranged on the side of the third surface 618 of the second substrate614. The first surface 601 of the first substrate 600 and the thirdsurface 618 of the second substrate 614 are bonded with each other and acavity 621 is formed between the first substrate 600 and the pressuresensing region 680 of the second substrate 614. The second substrate 614is thinned from the fourth surface by partially removing the second base610, to form a fifth surface 622 opposite to the third surface 618 ofthe second substrate 614.

In the embodiment, the first substrate 600 further includes a fixedelectrode 640 arranged on the side of the first surface 601 of the firstsubstrate 600. When the first surface 601 of the first substrate 600 andthe third surface 618 of the second substrate 614 are bonded with eachother, the fixed electrode 640 corresponds to the pressure-sensingelectrode 513 and the cavity is formed between the pressure-sensingelectrode 613 and the fixed electrode 640.

In another embodiment, the second substrate further includes a fixedelectrode corresponding to the pressure-sensing electrode, and thecavity is formed between the pressure-sensing electrode and the fixedelectrode.

The second substrate 614 further includes a second bonding layer 617 onthe side of the third surface 618. A step of bonding the first surface601 of the first substrate 600 and the third surface 618 of the secondsubstrate 614 with each other and a step of thinning the secondsubstrate 614 from the fourth surface are the same as those described inconjunction with FIGS. 18 and FIG. 19 according to the previousembodiment, which are not described herein.

Referring to FIG. 22, a third opening 660 is formed in the secondsubstrate 614 after the second substrate 614 is thinned from the fourthsurface, and a location of the third opening 660 corresponds to alocation of the pressure sensing region 680 of the second substrate 614.

The second opening 660 may pass through the second base 610, or may notpass through the second base 610.

In an embodiment, a third opening formed in the second substrate doesnot pass through the second base. Alternatively, at least one fifththrough hole passing through the second base is formed on the side ofthe fifth surface of the second substrate, and a location of the fifththrough hole corresponds to the pressure sensing region.

The second base having the fifth through hole may filter out dust in theair and may be used for an electric shielding. In addition, the secondbase located in the pressure sensing region may serve as a self-testelectrode. In a case that a bias voltage is applied to the second base,the second base may generate an electrostatic pull on thepressure-sensing electrode to detect whether the pressure-sensingresistor works normally.

The forming the third opening 660 includes: forming a patterned layer onthe fifth surface 622 of the second substrate 614, with a location wherea third opening 660 is to be formed being exposed from the patternedlayer; and etching the fifth surface 622 of the second substrate 614with the patterned layer being a mask, to form a third opening 660. Thepatterned layer is a patterned photoresist layer. The etching processincludes an anisotropic dry etching process. In the embodiment, theprotective layer 611 is exposed through the third opening 660.

Since a region other than the pressure sensing region 680 is covered bythe second base 610, a distance from the pressure-sensing electrode 613to the external environment is lengthened without affecting an accuracyof detecting an external pressure by the pressure-sensing electrode 613.In this case, the pressure-sensing electrode 613 is protected, and apressure sensing film and a protective layer 611 on the surface of thepressure sensing film is prevented from wears or other damages.

In an embodiment, the second substrate 614 further includes a sensingunit region and a reference unit region, and the cavity 621 is formed inthe sensing unit and the reference unit region. In this case, only aportion of a surface of the protective layer 611 corresponding to thesensing unit region is exposed through the third opening, and a portionof the surface region of the protective layer 611 corresponding to thereference unit region is still covered by the second base 610.Therefore, no additional cover layer is necessary on or above the secondbase 610 for increasing the stiffness, and the second base 610 may serveas a cover layer on a surface of a pressure sensing region 612 locatedin the reference unit region.

Referring to FIG. 23, a first conductive plug 623 passing through thesecond substrate 614 from the side of the fifth surface 622 of thesecond substrate 614 to a surface of the at least one conductive layer603 is formed, and the first conductive plug 623 is used to electricallyconnect the conductive layer 603 to the pressure-sensing electrode 613.

Material, structures and forming steps of a first conductive structureand the first conductive plug 623 are the same as those described inconjunction with FIGS. 8 and 9 according to the previous embodiment,which are not described herein.

Accordingly, the embodiment of the present disclosure further provides aMEMS pressure sensor formed with the above method. Reference is stillmade to FIG. 23. The MEMS pressure sensor includes a first substrate 600and a second substrate 614. The first substrate 600 includes a firstsurface 601 and a second surface 602 opposite to the first surface 601.The first substrate 600 includes a circuit 603 close to the firstsurface 601 of the first substrate 600. The second substrate 614includes a third surface 618 and a fifth surface 622 opposite to thethird surface 618. The second substrate 614 includes a second base 610and a pressure-sensing electrode 613 arranged on or above the secondbase 610, and the pressure-sensing electrode 613 is arranged on the sideof the third surface 618 of the second substrate 614. The secondsubstrate 614 includes a third opening 660, and a location of the thirdopening 660 corresponds to a location of the pressure-sensing electrode613. The first surface 601 of the first substrate 600 and the thirdsurface 618 of the second substrate 614 are bonded with each other, anda cavity 621 is formed between the first substrate 600 and the secondsubstrate 614. A first conductive plug 623 passing through the secondsubstrate 614 from the fifth surface 622 of the second substrate 614 tothe surface of the circuit 603 is formed. A first conductive structure,which is electrically connected to the pressure-sensing electrode 613and the first conductive plug 623, is formed.

Seventh Embodiment

FIGS. 24 to FIG. 26 are schematic cross-sectional diagrams of a MEMSpressure sensor in a fabrication process according to an embodiment ofthe present disclosure.

Referring to FIG. 24, a second substrate 714 is prepared. The secondsubstrate 714 includes a third surface 718 and a fourth surface 719opposite to the third surface 718. The second substrate 714 includes asecond base 710 and a pressure-sensing electrode 713 arranged in thesecond base 710. The second substrate 714 includes a pressure sensingregion 780 in which the pressure-sensing electrode 713 is arranged. Thepressure-sensing electrode is arranged on the side of the third surface718 of the second substrate 714.

In the embodiment, the pressure-sensing electrode is formed by thesecond base 710 which is a body base. A second bonding layer 717 isarranged on a surface of the second base 710. The pressure-sensingelectrode is formed on a side of the second base 710 in the pressuresensing region 780 close to the third surface 718. Material, structuresand fabrication processes of the second bonding layer 717 are the sameas those described in the previous embodiments, which are not describedherein.

In the embodiment, a first opening 720 is formed on the side of thethird surface 718 of the second substrate 714, and a location of thefirst opening 720 corresponds to a location of the pressure sensingregion 780.

In an embodiment, the second substrate 714 further includes a sensingunit region and a reference unit region, and the pressure-sensingelectrode is formed in the sensing unit and the reference unit region.

Referring to FIG. 25, a first substrate 700 is prepared. The firstsubstrate 700 includes a first surface 701 and a second surface 702opposite to the first surface 701. The first substrate 701 includes atleast one conductive layer 703 arranged on the side of the first surface701 of the first substrate 700. The first surface 701 of the firstsubstrate 700 and the third surface 718 of the second substrate 714 arebonded with each other, and a cavity 721 is formed between the firstsubstrate 700 and the pressure sensing region 780 of the secondsubstrate 714. The second substrate 714 is thinned from the fourthsurface 719 of the second substrate 714 by partially removing the secondbase 710, to form the fifth surface 722 opposite to the third surface718 of the second substrate 714.

In the embodiment, the first substrate 700 is the same as thosedescribed according to the previous embodiment; a step of bonding thefirst substrate 700 and the second substrate 714, and a step of thinningthe second substrate 714 from the fourth surface 719 are the same asthose described in conjunction with FIGS. 18 and FIG. 19 according tothe previous embodiment, which are not described herein.

The first substrate 700 further includes a circuit including asemiconductor component structure and an electrical interconnectionstructure. The conductive layer 703 may be a conductive layer of thecircuit, or may be a conductive layer added to the circuit. Theconductive layer 703 may include a conductor or a semiconductor.

In the embodiment, the first substrate 700 further includes a fixedelectrode 740 arranged on the side of the first surface 701 of the firstsubstrate 700, and a location of the first substrate 700 corresponds toa location of the pressure sensing region 780 of the second substrate714.

In the embodiment, the first substrate 700 includes a first bondinglayer 706 on the side of the first surface 701. In an embodiment, atleast one of the first bonding layer 706 and the second bonding layer717 may be comprised of an insulating material.

In an embodiment, the first surface 701 of the first substrate 700 andthe third surface 718 of the second substrate 714 may be bonded witheach other by a direct-bonding process. In another embodiment, the firstsurface 701 of the first substrate 700 and the third surface 718 of thesecond substrate 714 may be bonded with each other by an adhesivebonding process. The first bonding layer 706 or the second bonding layer717 is an adhesive bonding layer, which may be comprised of aninsulating material, a semiconductor material, a metal material or anorganic material.

In the embodiment, when the first substrate 700 and the second substrate714 are bonded with each other, a cavity 721 may be formed with thefirst substrate 700 and the first opening 720 located on the side of thethird surface 718 of the second substrate 714, and the cavity 721 isarranged between the pressure-sensing electrode 713 and the fixedelectrode 740.

Referring to FIG. 26, after the second substrate 714 is thinned from thefourth surface 719 of the second substrate 714, the second base 710 (asshown in FIG. 25) is etched to form a pressure-sensing electrode 713. Afirst conductive plug 723 passing through the second substrate 714 fromthe side of the fifth surface 722 of the second substrate 714 to the atleast one conductive layer 703 is formed, and the first conductive plug723 is used to electrically connect the conductive layer 703 to thepressure-sensing electrode 713.

A location of the pressure-sensing electrode 713 corresponds to alocation of the pressure sensing region 780. In the embodiment, anelectrode interconnection layer is formed by etching the second base 710while the pressure-sensing electrode 713 is formed. The electrodeinterconnection layer is electrically connected to the pressure-sensingelectrode 713.

In the embodiment, after the cavity 721 is formed, a third dielectriclayer 726 is formed partially on a surface of the second bonding layer717 and partially on a surface of the pressure-sensing electrode 713.The first conductive plug 723 passes through the third dielectric layer,the second bonding layer 717 and the first bonding layer 706 until it isconnected to the at least one conductive layer 703.

In the embodiment, a third conductive plug 724 is formed in the thirddielectric layer 726 and is electrically connected to the electrodeinterconnection layer. A first conductive layer 725 is formed partiallyon a surface of the third dielectric layer 726, partially on a surfaceof the third conductive plug 724 and partially on a surface of the firstconductive plug 723. A first conductive structure is formed with thethird conductive plug 724 and the first conductive layer 725. The firstconductive plug 723 is electrically connected to the pressure-sensingelectrode 713 through the first conductive structure.

Material, structures and forming steps of the first conductive structureand the first conductive plug 723 are the same as those described inconjunction with FIGS. 8 and FIG. 9 according to the previousembodiment, which are not described herein.

Eighth Embodiment

Based on FIG. 9, FIG. 27 is a schematic cross-sectional diagram of aMEMS pressure sensor in a fabrication process according to an embodimentof the present disclosure.

Referring to FIG. 27, a fourth conductive plug 800 passing through thefirst substrate 100 from the side of the second surface 102 of the firstsubstrate 100 to the at least one conductive layer 103 is formed. Theconductive layer 103 connected to the fourth conductive plug 800 and theconductive layer 103 connected to the first conductive plug 123 may bearranged in a same layer or different layers.

In the embodiment, the forming the fourth conductive plug 800 includes:forming a fourth dielectric layer 801 on the second surface of the firstsubstrate 100, with a portion of the second surface 102 of the firstsubstrate 100 being exposed from the fourth dielectric layer 801;etching the first substrate 100 with the fourth dielectric layer 801being a mask until at least one conductive layer 103 is exposed, to forma fourth through hole in the first substrate 100; and forming a fourthconductive plug 800 in the fourth through hole.

In the embodiment, before the fourth dielectric layer 801 is formed, thefirst substrate 100 may be thinned from the second surface 102, therebyreducing an etching depth and the difficulty of an etching process forforming the fourth through hole.

In the embodiment, after the fourth conductive plug 800 is formed, themethod further includes: forming a fourth conductive layer 802 on asurface of the fourth dielectric layer, with the fourth conductive layer802 being located on a top surface of the fourth conductive plug 800. Inaddition, a solder ball 803 may be formed on a surface of the fourthconductive layer 802, and the formed MEMS pressure sensor may beelectrically connected to wires on a printed circuit board via thesolder ball 803.

The fourth dielectric layer 801 is used to electrically isolate thefourth conductive layer 802 from the first substrate 104. The fourthdielectric layer 801 may be comprised of silicon oxide, silicon nitride,silicon oxynitride, a low-k dielectric material or an ultra low-kdielectric material. The fourth conductive layer 802 may be comprised ofa conductive material including a metal material, a metal compoundmaterial or a semiconductor material doped with ions. The fourth throughhole may be formed by an anisotropic dry etching process. The firstsubstrate 100 may be thinned from the second surface 102 by a chemicalmechanical polishing process.

The forming the fourth conductive plug 800 includes: forming aconductive film partially on the second surface 102 and partially in thefourth through hole, with the fourth through hole being filled with theconductive film; and removing an unnecessary portion of the conductivefilm on the second surface 102 to form the fourth conductive plug 800.In an embodiment, the conductive film on the second surface 102 may beremoved completely. In another embodiment, a portion of the conductivefilm may be reserved on the second surface 102.

An end of the fourth conductive plug 800 may protrude from, be recessedinto or be flush with, the second surface 102.

In an embodiment, before the conductive film is formed, an insulatinglayer is formed on a surface of a sidewall of the fourth through hole,and then the conductive film filling up the fourth through hole isformed after the insulating layer is formed. The insulating layer isused to electrically isolate the conductive film from the first base104.

The fourth conductive plug 800 may be comprised of copper, tungsten,aluminum, silver or gold. The conductive film may be formed by aphysical vapor deposition process, a chemical vapor deposition process,an atomic layer deposition process, an electroplating process or achemical plating process. The conductive film on the second surface 102may be removed by a chemical mechanical polishing process. In addition,a first barrier layer may be formed on the surface of the wall side ofthe fourth through hole and the conductive film is formed on a surfaceof the first barrier layer. The first barrier layer may be comprised ofone or more of titanium, tantalum, titanium nitride and titaniumnitride.

In another embodiment, before the first substrate and the secondsubstrate are bonded with each other, a fourth conductive plug is formedfrom the side of the first surface 101 of the first substrate 100, thatis, the fourth conductive plug may pass through the first substrate 100,or may not pass through the first substrate 100. In a case that thefourth conductive plug does not pass through the first substrate 100,after the fourth conductive plug is formed, the first substrate 100 isthinned from the second surface 102 until the fourth conductive plug isexposed. In the embodiment, the formed fourth conductive plug passesfrom the second surface 102 of the first substrate 100 to the at leastone conductive layer 103 on the side of the first surface 101. Theforming the fourth conductive plug 800 includes: forming a fourththrough hole on the side of the first surface 101 of the first substrate100, with the bottom of the fourth through hole protrudes into the firstbase 104; forming a conductive film partially on the first surface 101and partially in the fourth through hole, with the fourth through holebeing filled with the conductive film; and removing an unnecessaryportion of the conductive film on the first surface 101 to form thefourth conductive plug. In an embodiment, an insulating layer is formedon the surface of a sidewall of the fourth through hole before theconductive film is formed before the conductive film is formed, and thenthe conductive film filling up the fourth through hole is formed afterthe insulating layer is formed. The insulating layer is used toelectrically isolate the conductive film from and the first base 104.

Although the present disclosure is disclosed above, it is not intendedto limit the present disclosure. Various changes and modifications maybe made by those skilled in the art without departing from the spiritand scope of the present disclosure. Therefore, the scope of the presentdisclosure should be defined by the appended claims.

1. A method for forming a Micro-Electro Mechanical System (MEMS)pressure sensor, comprising: preparing a first substrate, wherein thefirst substrate comprises a first surface and a second surface oppositeto the first surface, and the first substrate comprises at least oneconductive layer arranged on the side of the first surface of the firstsubstrate; preparing a second substrate, wherein the second substratecomprises a third surface and a fourth surface opposite to the thirdsurface, the second substrate comprises a second base and apressure-sensing electrode arranged on or above or in the second base,the second substrate comprises a pressure sensing region in which thepressure-sensing electrode is arranged, and the pressure-sensingelectrode is arranged on the side of the third surface of the secondsubstrate; bonding the first surface of the first substrate and thethird surface of the second substrate with each other; forming a cavitybetween the first substrate and the pressure sensing region of thesecond substrate; thinning the second substrate from the fourth surfaceof the second substrate by partially removing the second base, to form afifth surface opposite to the third surface of the second substrate; andforming a first conductive plug passing through the second substratefrom the side of the fifth surface of the second substrate to the atleast one conductive layer, wherein the first conductive plug is used toelectrically connect the conductive layer to the pressure-sensingelectrode.
 2. The method for forming the MEMS pressure sensor accordingto claim 1, wherein the second substrate further comprises a fixedelectrode corresponding to the pressure-sensing electrode and the cavityis formed between the pressure-sensing electrode and the fixedelectrode.
 3. The method for forming the MEMS pressure sensor accordingto claim 1, wherein the first substrate further comprises a fixedelectrode arranged on the side of the first surface of the firstsubstrate; when the first surface of the first substrate and the thirdsurface of the second substrate are bonded with each other, the fixedelectrode corresponds to the pressure-sensing electrode and the cavityis formed between the pressure-sensing electrode and the fixedelectrode.
 4. The method for forming the MEMS pressure sensor accordingto claim 3, wherein the forming the cavity comprises: before the firstsurface of the first substrate and the third surface of the secondsubstrate are bonded with each other, forming a first opening on theside of the third surface of the second substrate or on the side of thefirst surface of the first substrate, or, forming the first opening onboth the side of the first surface of the first substrate and the sideof the third surface of the second substrate, with a location of thefirst opening corresponding to a location of the pressure sensingregion.
 5. The method for forming the MEMS pressure sensor according toclaim 1, wherein the first substrate further comprises a circuit.
 6. Themethod for forming the MEMS pressure sensor according to claim 1,wherein a third opening is formed in the second substrate after thesecond substrate is thinned from the fourth surface, with a location ofthe third opening corresponding to a location of the pressure sensingregion.
 7. The method for forming the MEMS pressure sensor according toclaim 1, wherein the preparing the second substrate comprises: preparinga semiconductor-on-insulator substrate, wherein thesemiconductor-on-insulator substrate comprises a base, an insulatinglayer arranged on a surface of the base and a semiconductor layerarranged on a surface of the insulating layer; and forming apressure-sensing electrode in the semiconductor layer, with the basebeing the second base.
 8. The method for forming the MEMS pressuresensor according to claim 1, wherein the second substrate furthercomprises a second bonding layer arranged on the side of the thirdsurface; or, the first substrate comprises a first bonding layerarranged on the side of the first surface; or, the second substratefurther comprises a second bonding layer arranged on the side of thethird surface and the first substrate comprises a first bonding layerarranged on the side of the first surface.
 9. The method for forming theMEMS pressure sensor according to claim 1, wherein the first surface ofthe first substrate and the third surface of the second substrate arebonded with each other by a direct-bonding process.
 10. The method forforming the MEMS pressure sensor according to claim 1, wherein thesecond substrate further comprises a reference unit region, a cavity isformed between the first substrate and the reference unit region of thesecond substrate when the first surface of the first substrate and thethird surface of the second substrate are bonded with each other, and adeformation on a portion of the second substrate corresponding to thereference unit region is less than a deformation on a portion of thesecond substrate corresponding to the pressure sensing region under asame external pressure.
 11. The method for forming the MEMS pressuresensor according to claim 1, further comprising: forming a secondopening passing through the first substrate, wherein a location of thesecond opening corresponds to a location of the pressure sensing regionof the second substrate after the first surface of the first substrateand the third surface of the second substrate are bonded with eachother.
 12. The method for forming the MEMS pressure sensor according toclaim 1, further comprising: forming at least one fifth through holepassing through the second base, on the side of the fifth surface of thesecond substrate, with a location of the fifth through holecorresponding to a location of the pressure sensing region.
 13. AMicro-Electro Mechanical System (MEMS) pressure sensor, comprising: afirst substrate, wherein the first substrate comprises a first surfaceand a second surface opposite to the first surface, and the firstsubstrate comprises at least one conductive layer arranged on the sideof the first surface of the first substrate; a second substrate, whereinthe second substrate comprises a third surface and a fifth surfaceopposite to the third surface, the second substrate comprises a secondbase and a pressure-sensing electrode arranged on or above or in thesecond base, and the second substrate comprises a pressure sensingregion in which the pressure-sensing electrode is arranged, the firstsurface of the first substrate and the third surface of the secondsubstrate are bonded with each other; a cavity formed between the firstsubstrate and the pressure sensing region of the second substrate; and afirst conductive plug passing through the second substrate from the sideof the fifth surface of the second substrate to the at least oneconductive layer, wherein the first conductive plug is used toelectrically connect the conductive layer to the pressure-sensingelectrode, wherein a third opening is formed in the second substrate,with a location of the third opening corresponding to a location of thepressure sensing region.
 14. The MEMS pressure sensor according to claim13, wherein the second substrate further comprises a fixed electrodecorresponding to the pressure-sensing electrode and the cavity is formedbetween the pressure-sensing electrode and the fixed electrode.
 15. TheMEMS pressure sensor according to claim 13, wherein the first substratefurther comprises a fixed electrode arranged on the side of the firstsurface of the first substrate; the fixed electrode corresponds to thepressure-sensing electrode and the cavity is formed between thepressure-sensing electrode and the fixed electrode.
 16. The MEMSpressure sensor according to claim 13, wherein the first substratefurther comprises a circuit.
 17. The MEMS pressure sensor according toclaim 13, wherein the second substrate further comprises a secondbonding layer arranged on the side of the third surface; or, the firstsubstrate comprises a first bonding layer arranged on the side of thefirst surface; or, the second substrate further comprises a secondbonding layer arranged on the side of the third surface and the firstsubstrate comprises a first bonding layer arranged on the side of thefirst surface.
 18. The MEMS pressure sensor according to claim 13,wherein the second substrate further comprises a reference unit region,a cavity is formed between the first substrate and the reference unitregion of the second substrate, and a deformation on a portion of thesecond substrate corresponding to the reference unit region is less thana deformation on a portion of the second substrate corresponding to thepressure sensing region.
 19. The MEMS pressure sensor according to claim13, wherein a second opening passing through the first substrate isformed, with a location of the second opening corresponding to alocation of the pressure sensing region of the second substrate.
 20. TheMEMS pressure sensor according to claim 13, further comprising: at leastone fifth through hole arranged on the side of the fifth surface of thesecond substrate and passing through the second base, with a location ofthe fifth through hole corresponding to a location of the pressuresensing region. 21-56. (canceled)